Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6242926 | Method and apparatus for moving an article relative to and between a pair of thickness measuring probes to develop a thickness map for the article | Anthony M. Ledger, Alexander A. Gomez | 2001-06-05 |
| 5610102 | Method for co-registering semiconductor wafers undergoing work in one or more blind process modules | Paul J. Clapis, Joseph P. Prusak, Sherman K. Poultney | 1997-03-11 |
| 5474647 | Wafer flow architecture for production wafer processing | Sherman K. Poultney, Peter B. Mumola, Joseph P. Prusak, Thomas J. McHugh | 1995-12-12 |
| 5364496 | Highly durable noncontaminating surround materials for plasma etching | Lynn David Bollinger, Michael Power, Richard R. Poole | 1994-11-15 |
| 5135307 | Laser diode interferometer | Peter De Groot, Gregg M. Gallatin | 1992-08-04 |