Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6242926 | Method and apparatus for moving an article relative to and between a pair of thickness measuring probes to develop a thickness map for the article | George J. Gardopee, Alexander A. Gomez | 2001-06-05 |
| 5555474 | Automatic rejection of diffraction effects in thin film metrology | — | 1996-09-10 |
| 5515167 | Transparent optical chuck incorporating optical monitoring | Michael Power | 1996-05-07 |
| 5502564 | Substrate thickness measurement using oblique incidence multispectral interferometry | — | 1996-03-26 |
| 5452953 | Film thickness measurement of structures containing a scattering surface | — | 1995-09-26 |
| 5436725 | Cofocal optical system for thickness measurements of patterned wafers | — | 1995-07-25 |
| 5386119 | Apparatus and method for thick wafer measurement | — | 1995-01-31 |
| 5365340 | Apparatus and method for measuring the thickness of thin films | — | 1994-11-15 |
| 5333049 | Apparatus and method for interferometrically measuring the thickness of thin films using full aperture irradiation | — | 1994-07-26 |
| 5293214 | Apparatus and method for performing thin film layer thickness metrology by deforming a thin film layer into a reflective condenser | — | 1994-03-08 |
| 5291269 | Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations | — | 1994-03-01 |