Issued Patents All Time
Showing 25 most recent of 126 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104897 | Interometric optical system | — | 2024-10-01 |
| 10591284 | Metrology of multi-layer stacks | Leslie L. Deck | 2020-03-17 |
| 10451413 | Surface topography apparatus and method | Leslie L. Deck | 2019-10-22 |
| 9958254 | Calibration of scanning interferometers | Jake Beverage, Xavier Colonna de Lega, Martin F. Fay | 2018-05-01 |
| 9798130 | Measuring topography of aspheric and other non-flat surfaces | Thomas Dresel, Jan Liesener | 2017-10-24 |
| 9746348 | Double pass interferometric encoder system | Jan Liesener | 2017-08-29 |
| 9658129 | Method and system for determining information about a transparent optical element comprising a lens portion and a plane parallel portion | Xavier Colonna de Lega, Martin F. Fay | 2017-05-23 |
| 9599534 | Optical evaluation of lenses and lens molds | Martin F. Fay, Xavier Colonna de Lega | 2017-03-21 |
| 9377292 | Interferometry employing refractive index dispersion broadening of interference signals | — | 2016-06-28 |
| 9140537 | Interferometric heterodyne optical encoder system | Michael D. Schroeder | 2015-09-22 |
| 9025162 | Interferometry for lateral metrology | Xavier Colonna de Lega, Robert Stoner | 2015-05-05 |
| 9025161 | Double pass interferometric encoder system | Jan Liesener | 2015-05-05 |
| 8988690 | Interferometric encoder systems | Leslie L. Deck, Michael D. Schroeder | 2015-03-24 |
| 8902431 | Low coherence interferometry with scan error correction | Jan Liesener, Mark Davidson, Xavier Colonna de Lega, Leslie L. Deck | 2014-12-02 |
| 8885172 | Interferometric heterodyne optical encoder system | Michael D. Schroeder | 2014-11-11 |
| 8854628 | Interferometric methods for metrology of surfaces, films and underresolved structures | Xavier Colonna de Lega, Jan Liesener | 2014-10-07 |
| 8780334 | Topographical profiling with coherence scanning interferometry | — | 2014-07-15 |
| 8670127 | Interferometric encoder systems | Leslie L. Deck, Michael D. Schroeder | 2014-03-11 |
| 8379218 | Fiber-based interferometer system for monitoring an imaging interferometer | Leslie L. Deck, Mark Davidson, Jan Liesener, Xavier Colonna De Lega | 2013-02-19 |
| 8300233 | Interferometric encoder systems | Leslie L. Deck, Michael D. Schroeder | 2012-10-30 |
| 8248617 | Interferometer for overlay measurements | Jan Liesener, Xavier Colonna De Lega | 2012-08-21 |
| 8189202 | Interferometer for determining overlay errors | Jan Liesener, Xavier Colonna De Lega | 2012-05-29 |
| 8126677 | Analyzing surface structure using scanning interferometry | Xavier Colonna De Lega | 2012-02-28 |
| 8120781 | Interferometric systems and methods featuring spectral analysis of unevenly sampled data | Jan Liesener, Mark Davidson, Xavier Colonna de Lega, Leslie L. Deck | 2012-02-21 |
| 8107085 | Methods and systems for interferometric analysis of surfaces and related applications | — | 2012-01-31 |