| 8902431 |
Low coherence interferometry with scan error correction |
Jan Liesener, Peter De Groot, Xavier Colonna de Lega, Leslie L. Deck |
2014-12-02 |
| 8379218 |
Fiber-based interferometer system for monitoring an imaging interferometer |
Leslie L. Deck, Peter De Groot, Jan Liesener, Xavier Colonna De Lega |
2013-02-19 |
| 8120781 |
Interferometric systems and methods featuring spectral analysis of unevenly sampled data |
Jan Liesener, Peter De Groot, Xavier Colonna de Lega, Leslie L. Deck |
2012-02-21 |
| 8107084 |
Interference microscope with scan motion detection using fringe motion in monitor patterns |
— |
2012-01-31 |
| 8004688 |
Scan error correction in low coherence scanning interferometry |
Jan Liesener, Peter De Groot, Xavier Colonna de Lega, Leslie L. Deck |
2011-08-23 |
| 7978338 |
Compound reference interferometer |
Peter De Groot, Jan Liesener, Xavier Colonna De Lega, Leslie L. Deck |
2011-07-12 |
| 7115881 |
Positioning and motion control by electrons, ions, and neutrals in electric fields |
Mario Rabinowitz |
2006-10-03 |
| 7061623 |
Interferometric back focal plane scatterometry with Koehler illumination |
— |
2006-06-13 |
| 7054071 |
Mireau interference objective lens |
— |
2006-05-30 |
| 6843573 |
Mini-optics solar energy concentrator |
Mario Rabinowitz |
2005-01-18 |
| 6738176 |
Dynamic multi-wavelength switching ensemble |
Mario Rabinowitz |
2004-05-18 |
| 6698693 |
Solar propulsion assist |
Mario Rabinowitz |
2004-03-02 |
| 6612705 |
Mini-optics solar energy concentrator |
Mario Rabinowitz |
2003-09-02 |
| 5282088 |
Aplanatic microlens and method for making same |
— |
1994-01-25 |
| 5112129 |
Method of image enhancement for the coherence probe microscope with applications to integrated circuit metrology |
Kalman Kaufman, Isaac Mazor |
1992-05-12 |
| 4818110 |
Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like |
— |
1989-04-04 |