Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10386313 | Closed-loop control of X-ray knife edge | Yuri Vinshtein, Matthew Wormington, Nikolai Kasper | 2019-08-20 |
| 9829448 | Measurement of small features using XRF | Matthew Wormington, Alex Tokar, Alex Dikopoltsev | 2017-11-28 |
| 9666322 | X-ray source assembly | Asher Peled, Alex Brandt, Matthew Wormington | 2017-05-30 |
| 9632043 | Method for accurately determining the thickness and/or elemental composition of small features on thin-substrates using micro-XRF | Fouad Atrash, Alex Tokar, Olga Ostrovsky | 2017-04-25 |
| 9606073 | X-ray scatterometry apparatus | Alex Krokhmal, Alex Dikopoltsev, Matthew Wormington | 2017-03-28 |
| 9551677 | Angle calibration for grazing-incidence X-ray fluorescence (GIXRF) | Asher Peled | 2017-01-24 |
| 9390984 | X-ray inspection of bumps on a semiconductor substrate | Alex Tokar, Boris Yokhin, Matthew Wormington | 2016-07-12 |
| 9389192 | Estimation of XRF intensity from an array of micro-bumps | Alex Tokar, Alex Dikopoltsev, Matthew Wormington | 2016-07-12 |
| 8731138 | High-resolution X-ray diffraction measurement with enhanced sensitivity | Boris Yokhin, Alexander Krohmal, Amos Gvirtzman, Gennady Openganden, David Berman +1 more | 2014-05-20 |
| 8565379 | Combining X-ray and VUV analysis of thin film layers | Matthew Wormington, Ayelet Dag, Bagrat Khachatryan | 2013-10-22 |
| 8243878 | High-resolution X-ray diffraction measurement with enhanced sensitivity | Boris Yokhin, Alexander Krohmal, Amos Gvirtzman, Gennady Openganden, David Berman +1 more | 2012-08-14 |
| 7804934 | Accurate measurement of layer dimensions using XRF | Dileep Agnihotri, Jeremy O'Dell, Boris Yokhin | 2010-09-28 |
| 7653174 | Inspection of small features using X-ray fluorescence | David Berman, Boris Yokhin, Alexander Tokar | 2010-01-26 |
| 7649978 | Automated selection of X-ray reflectometry measurement locations | Alex Dikopoltsev, Boris Yokhin, Dileep Agnihotri, Tzachi Rafaeli, Alex Tokar +2 more | 2010-01-19 |
| 7551719 | Multifunction X-ray analysis system | Boris Yokhin, Alexander Krokhmal, Tzachi Rafaeli, Amos Gvirtzman | 2009-06-23 |
| 7483513 | Measurement of properties of thin films on sidewalls | Boris Yokhin | 2009-01-27 |
| 7481579 | Overlay metrology using X-rays | Boris Yokhin, Sean Jameson, Alex Dikopoltsev | 2009-01-27 |
| 7453985 | Control of X-ray beam spot size | David Berman | 2008-11-18 |
| 7245695 | Detection of dishing and tilting using X-ray fluorescence | Alex Dikopoltsev, Boris Yokhin, Tzachi Rafaeli, Alex Tokar | 2007-07-17 |
| 7231016 | Efficient measurement of diffuse X-ray reflections | David Berman, Boris Yokhin, Amos Gvirtzman | 2007-06-12 |
| 7120228 | Combined X-ray reflectometer and diffractometer | Boris Yokhin, Tzachi Rafaeli | 2006-10-10 |
| 7113566 | Enhancing resolution of X-ray measurements by sample motion | Asher Peled, Boris Yokhin | 2006-09-26 |
| 7110491 | Measurement of critical dimensions using X-ray diffraction in reflection mode | Boris Yokhin | 2006-09-19 |
| 7068753 | Enhancement of X-ray reflectometry by measurement of diffuse reflections | David Berman, Boris Yokhin, Amos Gvirtzman | 2006-06-27 |
| 7023954 | Optical alignment of X-ray microanalyzers | Tzachi Rafaeli | 2006-04-04 |