| 12085521 |
Small-angle X-ray scatterometry |
Matthew Wormington, Yuri Vinshtein, Alexander Krokhmal |
2024-09-10 |
| 11703464 |
Small-angle x-ray scatterometry |
Matthew Wormington, Yuri Vinshtein, Alexander Krokhmal |
2023-07-18 |
| 11181490 |
Small-angle x-ray scatterometry |
Matthew Wormington, Yuri Vinshtein, Alexander Krokhmal |
2021-11-23 |
| 11169099 |
Method and apparatus for X-ray scatterometry |
Alex Krokhmal, Juri Vinshtein |
2021-11-09 |
| 10684238 |
Method and apparatus for X-ray scatterometry |
Alex Krokhmal, Juri Vinshtein |
2020-06-16 |
| 10177841 |
Electro-optic transceiver module with wavelength compensation |
Elad Mentovich, Itshak Kalifa, Sylvie Rockman, Alon Webman, Dalit Kimhi |
2019-01-08 |
| 9829448 |
Measurement of small features using XRF |
Matthew Wormington, Isaac Mazor, Alex Tokar |
2017-11-28 |
| 9606073 |
X-ray scatterometry apparatus |
Isaac Mazor, Alex Krokhmal, Matthew Wormington |
2017-03-28 |
| 9389192 |
Estimation of XRF intensity from an array of micro-bumps |
Alex Tokar, Isaac Mazor, Matthew Wormington |
2016-07-12 |
| 7649978 |
Automated selection of X-ray reflectometry measurement locations |
Isaac Mazor, Boris Yokhin, Dileep Agnihotri, Tzachi Rafaeli, Alex Tokar +2 more |
2010-01-19 |
| 7481579 |
Overlay metrology using X-rays |
Boris Yokhin, Isaac Mazor, Sean Jameson |
2009-01-27 |
| 7245695 |
Detection of dishing and tilting using X-ray fluorescence |
Isaac Mazor, Boris Yokhin, Tzachi Rafaeli, Alex Tokar |
2007-07-17 |
| 7130376 |
X-ray reflectometry of thin film layers with enhanced accuracy |
David Berman, Dileep Agnihotri |
2006-10-31 |
| 7103142 |
Material analysis using multiple X-ray reflectometry models |
Dileep Agnihotri, Boris Yokhin |
2006-09-05 |
| 7062013 |
X-ray reflectometry of thin film layers with enhanced accuracy |
David Berman, Dileep Agnihotri |
2006-06-13 |