| 12249059 |
Navigation accuracy using camera coupled with detector assembly |
Alexander Brandt, Dor Perry, Asher Peled, Matthew Wormington |
2025-03-11 |
| 12085521 |
Small-angle X-ray scatterometry |
Alex Dikopoltsev, Matthew Wormington, Yuri Vinshtein |
2024-09-10 |
| 12078604 |
Monitoring properties of X-ray beam during X-ray analysis |
Asher Peled |
2024-09-03 |
| 11781999 |
Spot-size control in reflection-based and scatterometry-based X-ray metrology systems |
— |
2023-10-10 |
| 11703464 |
Small-angle x-ray scatterometry |
Alex Dikopoltsev, Matthew Wormington, Yuri Vinshtein |
2023-07-18 |
| 11302508 |
X-ray tube |
John Leonard Wall |
2022-04-12 |
| 11181490 |
Small-angle x-ray scatterometry |
Alex Dikopoltsev, Matthew Wormington, Yuri Vinshtein |
2021-11-23 |
| 10976270 |
X-ray detection optics for small-angle X-ray scatterometry |
Matthew Wormington, Asher Peled |
2021-04-13 |
| 10976268 |
X-ray source optics for small-angle X-ray scatterometry |
Matthew Wormington, Yuri Vinshtein |
2021-04-13 |
| 10976269 |
Wafer alignment for small-angle x-ray scatterometry |
Yuri Vinshtein, Asher Peled, Guy Sheaffer, Matthew Wormington |
2021-04-13 |
| 8437450 |
Fast measurement of X-ray diffraction from tilted layers |
John Leonard Wall, David N. Jacques, Boris Yokhin, Paul Ryan, Richard Thake Bytheway +2 more |
2013-05-07 |
| 7680243 |
X-ray measurement of properties of nano-particles |
Boris Yokhin, Alexander Tokar, Asher Peled, Dileep Agnihotri |
2010-03-16 |
| 7600916 |
Target alignment for X-ray scattering measurements |
Boris Yokhin, Asher Peled, David Berman |
2009-10-13 |
| 7551719 |
Multifunction X-ray analysis system |
Boris Yokhin, Tzachi Rafaeli, Isaac Mazor, Amos Gvirtzman |
2009-06-23 |
| 7321652 |
Multi-detector EDXRD |
Boris Yokhin, Alex Tokar |
2008-01-22 |