| 12249059 |
Navigation accuracy using camera coupled with detector assembly |
Alexander Krokhmal, Alexander Brandt, Dor Perry, Asher Peled |
2025-03-11 |
| 12085521 |
Small-angle X-ray scatterometry |
Alex Dikopoltsev, Yuri Vinshtein, Alexander Krokhmal |
2024-09-10 |
| 11761913 |
Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt of stacks of high-aspect-ratio (HAR) structures |
Adam Ginsburg, Mark Vermeulen, Paul Ryan |
2023-09-19 |
| 11703464 |
Small-angle x-ray scatterometry |
Alex Dikopoltsev, Yuri Vinshtein, Alexander Krokhmal |
2023-07-18 |
| 11181490 |
Small-angle x-ray scatterometry |
Alex Dikopoltsev, Yuri Vinshtein, Alexander Krokhmal |
2021-11-23 |
| 10976270 |
X-ray detection optics for small-angle X-ray scatterometry |
Asher Peled, Alexander Krokhmal |
2021-04-13 |
| 10976269 |
Wafer alignment for small-angle x-ray scatterometry |
Yuri Vinshtein, Alexander Krokhmal, Asher Peled, Guy Sheaffer |
2021-04-13 |
| 10976268 |
X-ray source optics for small-angle X-ray scatterometry |
Alexander Krokhmal, Yuri Vinshtein |
2021-04-13 |
| 10816487 |
Image contrast in X-ray topography imaging for defect inspection |
Kevin Monroe Matney, Oliver Whear, Richard Thake Bytheway, John Leonard Wall |
2020-10-27 |
| 10634628 |
X-ray fluorescence apparatus for contamination monitoring |
Nikolai Kasper, Juliette P. M. van der Meer, Elad Yaacov Schwarcz |
2020-04-28 |
| 10386313 |
Closed-loop control of X-ray knife edge |
Isaac Mazor, Yuri Vinshtein, Nikolai Kasper |
2019-08-20 |
| 9829448 |
Measurement of small features using XRF |
Isaac Mazor, Alex Tokar, Alex Dikopoltsev |
2017-11-28 |
| 9726624 |
Using multiple sources/detectors for high-throughput X-ray topography measurement |
Paul Ryan, John Leonard Wall |
2017-08-08 |
| 9666322 |
X-ray source assembly |
Isaac Mazor, Asher Peled, Alex Brandt |
2017-05-30 |
| 9606073 |
X-ray scatterometry apparatus |
Isaac Mazor, Alex Krokhmal, Alex Dikopoltsev |
2017-03-28 |
| 9390984 |
X-ray inspection of bumps on a semiconductor substrate |
Isaac Mazor, Alex Tokar, Boris Yokhin |
2016-07-12 |
| 9389192 |
Estimation of XRF intensity from an array of micro-bumps |
Alex Tokar, Alex Dikopoltsev, Isaac Mazor |
2016-07-12 |
| 8781070 |
Detection of wafer-edge defects |
Paul Ryan, John Leonard Wall |
2014-07-15 |
| 8731138 |
High-resolution X-ray diffraction measurement with enhanced sensitivity |
Boris Yokhin, Isaac Mazor, Alexander Krohmal, Amos Gvirtzman, Gennady Openganden +1 more |
2014-05-20 |
| 8687766 |
Enhancing accuracy of fast high-resolution X-ray diffractometry |
Alexander Krohmal, David Berman, Gennady Openganden |
2014-04-01 |
| 8565379 |
Combining X-ray and VUV analysis of thin film layers |
Isaac Mazor, Ayelet Dag, Bagrat Khachatryan |
2013-10-22 |
| 8437450 |
Fast measurement of X-ray diffraction from tilted layers |
John Leonard Wall, David N. Jacques, Boris Yokhin, Alexander Krokhmal, Paul Ryan +2 more |
2013-05-07 |
| 8243878 |
High-resolution X-ray diffraction measurement with enhanced sensitivity |
Boris Yokhin, Isaac Mazor, Alexander Krohmal, Amos Gvirtzman, Gennady Openganden +1 more |
2012-08-14 |
| 6782076 |
X-ray topographic system |
David Keith Bowen, Ladislav Pina, Petra Feichtinger |
2004-08-24 |
| 6192103 |
Fitting of X-ray scattering data using evolutionary algorithms |
Charles Panaccione, Kevin Monroe Matney, David Keith Bowen |
2001-02-20 |