Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8379218 | Fiber-based interferometer system for monitoring an imaging interferometer | Leslie L. Deck, Peter De Groot, Mark Davidson, Jan Liesener | 2013-02-19 |
| 8248617 | Interferometer for overlay measurements | Peter De Groot, Jan Liesener | 2012-08-21 |
| 8189202 | Interferometer for determining overlay errors | Jan Liesener, Peter De Groot | 2012-05-29 |
| 8126677 | Analyzing surface structure using scanning interferometry | Peter De Groot | 2012-02-28 |
| 7978338 | Compound reference interferometer | Peter De Groot, Mark Davidson, Jan Liesener, Leslie L. Deck | 2011-07-12 |
| 7978337 | Interferometer utilizing polarization scanning | Peter De Groot | 2011-07-12 |
| 7952724 | Interferometer with multiple modes of operation for determining characteristics of an object surface | Peter De Groot | 2011-05-31 |
| 7948636 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin | 2011-05-24 |
| 7889355 | Interferometry for lateral metrology | Robert Stoner, Peter De Groot | 2011-02-15 |
| 7884947 | Interferometry for determining characteristics of an object surface, with spatially coherent illumination | Peter De Groot | 2011-02-08 |
| 7684049 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin | 2010-03-23 |
| 7636168 | Interferometry method and system including spectral decomposition | Peter De Groot | 2009-12-22 |
| 7619746 | Generating model signals for interferometry | — | 2009-11-17 |
| 7616323 | Interferometer with multiple modes of operation for determining characteristics of an object surface | Peter De Groot | 2009-11-10 |
| 7466429 | Profiling complex surface structures using scanning interferometry | Peter De Groot, Robert Stoner | 2008-12-16 |
| 7446882 | Interferometer for determining characteristics of an object surface | Peter De Groot | 2008-11-04 |
| 7428057 | Interferometer for determining characteristics of an object surface, including processing and calibration | Peter De Groot | 2008-09-23 |
| 7324214 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin | 2008-01-29 |
| 7324210 | Scanning interferometry for thin film thickness and surface measurements | Peter De Groot | 2008-01-29 |
| 7304747 | Methods and systems for determining optical properties using low-coherence interference signals | — | 2007-12-04 |
| 7292346 | Triangulation methods and systems for profiling surfaces through a thin film coating | Peter De Groot | 2007-11-06 |
| 7289224 | Low coherence grazing incidence interferometry for profiling and tilt sensing | Peter De Groot, Michael Kuchel | 2007-10-30 |
| 7271918 | Profiling complex surface structures using scanning interferometry | Peter De Groot, Robert Stoner | 2007-09-18 |
| 7239398 | Profiling complex surface structures using height scanning interferometry | Peter De Groot, Robert Stoner | 2007-07-03 |
| 7212291 | Interferometric microscopy using reflective optics for complex surface shapes | Charles McFee | 2007-05-01 |