Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193759 | Heterodyning optical phase measuring device for specular surfaces | — | 2021-12-07 |
| 10627223 | Heterodyning optical phase measuring device for specular surfaces | — | 2020-04-21 |
| 9610653 | Method and apparatus for separation of workpieces and articles produced thereby | Haibin Zhang, Fang Shan, Mathew Noel Rekow, Min Zhang, Glenn Simenson +5 more | 2017-04-04 |
| 8818754 | Thin films and surface topography measurement using reduced library | Boris V. Kamenev | 2014-08-26 |
| 8534135 | Local stress measurement | Timothy A. Johnson | 2013-09-17 |
| 7948636 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega | 2011-05-24 |
| 7684049 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega | 2010-03-23 |
| 7539583 | Method and system for defect detection | Yonghang Fu, Yongqiang Liu | 2009-05-26 |
| 7324214 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega | 2008-01-29 |