Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9025162 | Interferometry for lateral metrology | Xavier Colonna de Lega, Peter De Groot | 2015-05-05 |
| 7948636 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Gregg M. Gallatin, Xavier Colonna De Lega | 2011-05-24 |
| 7889355 | Interferometry for lateral metrology | Xavier Colonna De Lega, Peter De Groot | 2011-02-15 |
| 7684049 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Gregg M. Gallatin, Xavier Colonna De Lega | 2010-03-23 |
| 7466429 | Profiling complex surface structures using scanning interferometry | Peter De Groot, Xavier Colonna De Lega | 2008-12-16 |
| 7324214 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Gregg M. Gallatin, Xavier Colonna De Lega | 2008-01-29 |
| 7271918 | Profiling complex surface structures using scanning interferometry | Peter De Groot, Xavier Colonna De Lega | 2007-09-18 |
| 7239398 | Profiling complex surface structures using height scanning interferometry | Peter De Groot, Xavier Colonna De Lega | 2007-07-03 |
| 7106454 | Profiling complex surface structures using scanning interferometry | Peter De Groot, Xavier Colonna De Lega | 2006-09-12 |