| 9025162 |
Interferometry for lateral metrology |
Xavier Colonna de Lega, Peter De Groot |
2015-05-05 |
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Interferometer and method for measuring characteristics of optically unresolved surface features |
Peter De Groot, Michael J. Darwin, Gregg M. Gallatin, Xavier Colonna De Lega |
2011-05-24 |
| 7889355 |
Interferometry for lateral metrology |
Xavier Colonna De Lega, Peter De Groot |
2011-02-15 |
| 7684049 |
Interferometer and method for measuring characteristics of optically unresolved surface features |
Peter De Groot, Michael J. Darwin, Gregg M. Gallatin, Xavier Colonna De Lega |
2010-03-23 |
| 7466429 |
Profiling complex surface structures using scanning interferometry |
Peter De Groot, Xavier Colonna De Lega |
2008-12-16 |
| 7324214 |
Interferometer and method for measuring characteristics of optically unresolved surface features |
Peter De Groot, Michael J. Darwin, Gregg M. Gallatin, Xavier Colonna De Lega |
2008-01-29 |
| 7271918 |
Profiling complex surface structures using scanning interferometry |
Peter De Groot, Xavier Colonna De Lega |
2007-09-18 |
| 7239398 |
Profiling complex surface structures using height scanning interferometry |
Peter De Groot, Xavier Colonna De Lega |
2007-07-03 |
| 7106454 |
Profiling complex surface structures using scanning interferometry |
Peter De Groot, Xavier Colonna De Lega |
2006-09-12 |