Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8238644 | Fast method to model photoresist images using focus blur and resist blur | Timothy A. Brunner, Ronald Gordon, Kafai Lai, Alan E. Rosenbluth, Nakgeuon Seong | 2012-08-07 |
| 7948636 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Robert Stoner, Xavier Colonna De Lega | 2011-05-24 |
| 7840057 | Simultaneous computation of multiple points on one or multiple cut lines | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2010-11-23 |
| 7774737 | Performance in model-based OPC engine utilizing efficient polygon pinning method | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2010-08-10 |
| 7761839 | Performance in model-based OPC engine utilizing efficient polygon pinning method | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2010-07-20 |
| 7684049 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Robert Stoner, Xavier Colonna De Lega | 2010-03-23 |
| 7512927 | Printability verification by progressive modeling accuracy | Kafai Lai, Maharaj Mukherjee, Alan E. Rosenbluth | 2009-03-31 |
| 7434196 | Renesting interaction map into design for efficient long range calculations | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2008-10-07 |
| 7366342 | Simultaneous computation of multiple points on one or multiple cut lines | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2008-04-29 |
| 7343271 | Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flare | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2008-03-11 |
| 7324214 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Robert Stoner, Xavier Colonna De Lega | 2008-01-29 |
| 7287239 | Performance in model-based OPC engine utilizing efficient polygon pinning method | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2007-10-23 |
| 7131104 | Fast and accurate optical proximity correction engine for incorporating long range flare effects | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Dov Ramm, Alan E. Rosenbluth +3 more | 2006-10-31 |
| 7127699 | Method for optimizing a number of kernels used in a sum of coherent sources for optical proximity correction in an optical microlithography process | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2006-10-24 |
| 7092070 | Illumination system with spatially controllable partial coherence compensating for line width variances | Andrew W. McCullough | 2006-08-15 |
| 7079223 | Fast model-based optical proximity correction | Alan E. Rosenbluth, Ronald Gordon, Nakgeuon Seong, Alexey Y. Lvov, William D. Hinsberg +3 more | 2006-07-18 |
| 7055126 | Renesting interaction map into design for efficient long range calculations | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2006-05-30 |
| 7010776 | Extending the range of lithographic simulation integrals | Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee, Dov Ramm +2 more | 2006-03-07 |
| 6822728 | Illumination system with spatially controllable partial coherence compensation for line width variances in a photolithographic system | Andrew W. McCullough | 2004-11-23 |
| 6628370 | Illumination system with spatially controllable partial coherence compensating for line width variances in a photolithographic system | Andrew W. McCullough | 2003-09-30 |
| 6259513 | Illumination system with spatially controllable partial coherence | Andrew W. McCullough | 2001-07-10 |
| 5631721 | Hybrid illumination system for use in photolithography | Stuart Stanton, Mark Oskotsky, Frits Zernike | 1997-05-20 |
| 5594543 | Laser diode radar with extended range | Peter De Groot, Chandra Roychoudhuri | 1997-01-14 |
| 5559601 | Mask and wafer diffraction grating alignment system wherein the diffracted light beams return substantially along an incident angle | Justin Kreuzer, Michael L. Nelson | 1996-09-24 |
| 5477057 | Off axis alignment system for scanning photolithography | David Angeley, Stan Drazkiewicz | 1995-12-19 |