| 12039402 |
Color-map method to eliminate qubit frequency crowding in a quantum computing chip |
Jared Barney Hertzberg, Dongbing Shao |
2024-07-16 |
$23,207,000 |
| 10915686 |
Tool to provide integrated circuit masks with accurate dimensional compensation of patterns |
— |
2021-02-09 |
$3,536,000 |
| 10872188 |
Tool to provide integrated circuit masks with accurate dimensional compensation of patterns |
— |
2020-12-22 |
$76,512,000 |
| 10437950 |
Tool to provide integrated circuit masks with accurate dimensional compensation of patterns |
— |
2019-10-08 |
$4,743,000 |
| 10394984 |
Tool to provide integrated circuit masks with accurate dimensional compensation of patterns |
— |
2019-08-27 |
$1,335,000 |
| 10210295 |
Tool to provide integrated circuit masks with accurate dimensional compensation of patterns |
— |
2019-02-19 |
$3,019,000 |
| 10120963 |
Figurative models calibrated to correct errors in process models |
Pardeep Kumar, Ramana Murthy Pusuluri, Ramya Viswanathan |
2018-11-06 |
$15,674,000 |
| 9857676 |
Method and program product for designing source and mask for lithography |
Tadanobu Inoue, David O. Melville, Masaharu Sakamoto, Kehan Tian |
2018-01-02 |
$1,907,000 |
| 9651856 |
Source, target and mask optimization by incorporating contour based assessments and integration over process variations |
Tadanobu Inoue, David O. Melville, Masaharu Sakamoto, Kehan Tian |
2017-05-16 |
$2,370,000 |
| 9395622 |
Synthesizing low mask error enhancement factor lithography solutions |
Tadanobu Inoue, David O. Melville, Masaharu Sakamoto, Kehan Tian |
2016-07-19 |
$2,452,000 |
| 9310674 |
Mask that provides improved focus control using orthogonal edges |
Jaione Tirapu Azpiroz, Timothy A. Brunner |
2016-04-12 |
$2,843,000 |
| 9250535 |
Source, target and mask optimization by incorporating countour based assessments and integration over process variations |
Tadanobu Inoue, David O. Melville, Masaharu Sakamoto, Kehan Tian |
2016-02-02 |
$1,325,000 |
| 8959462 |
Mask design method, program, and mask design system |
Tadanobu Inoue, David O. Melville, Masaharu Sakamoto, Kehan Tian |
2015-02-17 |
$5,211,000 |
| 8954898 |
Source-mask optimization for a lithography process |
Tadanobu Inoue, David O. Melville, Masaharu Sakamoto, Kehan Tian |
2015-02-10 |
$3,717,000 |
| 8910089 |
Printing process calibration and correction |
Samit Barai |
2014-12-09 |
$5,061,000 |
| 8880382 |
Analyzing a patterning process using a model of yield |
Saeed Bagheri, Fook-Luen Heng, Rajiv V. Joshi, Kafai Lai, David O. Melville +3 more |
2014-11-04 |
$3,955,000 |
| 8867024 |
Reflective film interface to restore transverse magnetic wave contrast in lithographic processing |
Kafai Lai, Dirk Pfeiffer |
2014-10-21 |
$3,429,000 |
| 8769445 |
Method for determining mask operation activities |
Emily Gallagher, Jed H. Rankin |
2014-07-01 |
$3,868,000 |
| 8719735 |
Optimizing lithographic mask for manufacturability in efficient manner |
Masaharu Sakamoto, Marc Alan Szeto-Millstone, Tadanobu Inoue, Kehan Tian, Andreas Waechter +2 more |
2014-05-06 |
$5,370,000 |
| 8682634 |
Analyzing a patterning process using a model of yield |
Saeed Bagheri, Fook-Luen Heng, Rajiv V. Joshi, Kafai Lai, David O. Melville +3 more |
2014-03-25 |
$4,381,000 |
| 8605254 |
Constrained optimization of lithographic source intensities under contingent requirements |
Saeed Bagheri, Kafai Lai, David O. S. Melville, Kehan Tian |
2013-12-10 |
$5,756,000 |
| 8539390 |
Determining manufacturability of lithographic mask based on manufacturing shape penalty of aspect ratio of edge that takes into account pair of connected edges of the edge |
Tadanobu Inoue, Kehan Tian, David O. Melville, Masaharu Sakamoto |
2013-09-17 |
$4,204,000 |
| 8537444 |
System and method for projection lithography with immersed image-aligned diffractive element |
Dario Gil, David O. Melville, Kehan Tian, Jaione Tirapu Azpiroz |
2013-09-17 |
$4,204,000 |
| 8495528 |
Method for generating a plurality of optimized wavefronts for a multiple exposure lithographic process |
Saeed Bagheri, Kafai Lai, David O. S. Melville, Kehan Tian, Jaione Tirapu Azpiroz |
2013-07-23 |
$2,085,000 |
| 8453076 |
Wavefront engineering of mask data for semiconductor device design |
Tadanobu Inoue, David O. Melville, Hidemasa Muta, Kehan Tian, Masaharu Sakamoto +1 more |
2013-05-28 |
$7,454,000 |
