Issued Patents All Time
Showing 1–25 of 216 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10976666 | Apparatus and related method to control radiation transmission through mask pattern | Ezra D. B. Hall, Alok Vaid | 2021-04-13 |
| 10816483 | Double pass diluted ultraviolet reticle inspection | Guoxiang Ning, Paul Ackmann, Jung-Yu Hsieh, Ming Lei | 2020-10-27 |
| 10768521 | Extreme ultraviolet (EUV) mask absorber and method for forming the same | Amr Y. Abdo, Lei Zhuang | 2020-09-08 |
| 10712498 | Shielding structures between optical waveguides | John J. Ellis-Monaghan, Jeffrey P. Gambino, Mark D. Jaffe, Kirk D. Peterson | 2020-07-14 |
| 10564554 | System and method for analyzing printed masks for lithography based on representative contours | Liang Cao, Jie Zhang, Yulu Chen | 2020-02-18 |
| 10552569 | Method for calculating non-correctable EUV blank flatness for blank dispositioning | Christina A. Turley, Xuemei Chen, Allen H. Gabor, Timothy A. Brunner | 2020-02-04 |
| 10468149 | Extreme ultraviolet mirrors and masks with improved reflectivity | Yulu Chen, Francis Goodwin, Lei Sun, Obert R. Wood, II | 2019-11-05 |
| 10191213 | Shielding structures between optical waveguides | John J. Ellis-Monaghan, Jeffrey P. Gambino, Mark D. Jaffe, Kirk D. Peterson | 2019-01-29 |
| 10008597 | Semiconductor devices with asymmetric halo implantation and method of manufacture | Darshana N. Bhagat, Thomas J. Dunbar, Yen L. Lim, Eva Shah Holmes | 2018-06-26 |
| 9946152 | Extreme ultraviolet lithography photomasks | Zhengqing John Qi, Christina A. Turley | 2018-04-17 |
| 9927698 | Dual exposure patterning of a photomask to print a contact, a via or curvilinear shape on an integrated circuit | Adam C. Smith | 2018-03-27 |
| 9791771 | Photomask structure with an etch stop layer that enables repairs of detected defects therein and extreme ultraviolet(EUV) photolithograpy methods using the photomask structure | Zhengqing John Qi | 2017-10-17 |
| 9740080 | Waveguide switch with tuned photonic microring | John J. Ellis-Monaghan, Jeffrey P. Gambino, Mark D. Jaffe, Kirk D. Peterson | 2017-08-22 |
| 9508578 | Method and apparatus for detecting foreign material on a chuck | Shawn A. Adderly, Samantha D. DiStefano, Jeffrey P. Gambino, Max G. Levy, Max L. Lifson +1 more | 2016-11-29 |
| 9436789 | Structure, method and system for complementary strain fill for integrated circuit chips | Brent A. Anderson, Edward J. Nowak | 2016-09-06 |
| 9437595 | Barrier trench structure and methods of manufacture | Brent A. Anderson, Andres Bryant, Edward J. Nowak | 2016-09-06 |
| 9276002 | Integrated circuit structure with bulk silicon FinFET | Kangguo Cheng, Ali Khakifirooz, Qizhi Liu, Edward J. Nowak | 2016-03-01 |
| 9263517 | Extremely thin semiconductor-on-insulator (ETSOI) layer | Wagdi W. Abadeer, Kiran V. Chatty, Jason E. Cummings, Toshiharu Furukawa, Robert J. Gauthier, Jr. +2 more | 2016-02-16 |
| 9196528 | Use of contacts to create differential stresses on devices | John J. Ellis-Monaghan, Jeffrey P. Gambino, Kirk D. Peterson, Robert R. Robison | 2015-11-24 |
| 9097989 | Target and method for mask-to-wafer CD, pattern placement and overlay measurement and control | Christopher P. Ausschnitt, Jaime D. Morillo, Roger J. Yerdon | 2015-08-04 |
| 9093478 | Integrated circuit structure with bulk silicon FinFET and methods of forming | Kangguo Cheng, Ali Khakifirooz, Qizhi Liu, Edward J. Nowak | 2015-07-28 |
| 9064974 | Barrier trench structure and methods of manufacture | Brent A. Anderson, Andres Bryant, Edward J. Nowak | 2015-06-23 |
| 9059017 | Source/drain-to-source/drain recessed strap and methods of manufacture of same | Brent A. Anderson, Edward J. Nowak | 2015-06-16 |
| 9040383 | Devices with gate-to-gate isolation structures and methods of manufacture | Brent A. Anderson, Edward J. Nowak | 2015-05-26 |
| 9041107 | Devices with gate-to-gate isolation structures and methods of manufacture | Brent A. Anderson, Edward J. Nowak | 2015-05-26 |