Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802393 | Extreme ultraviolet (EUV) lithography mask | Lei Sun, Genevieve Beique, Yulu Chen, Erik Verduijn, Francis Goodwin | 2020-10-13 |
| 10468149 | Extreme ultraviolet mirrors and masks with improved reflectivity | Yulu Chen, Francis Goodwin, Jed H. Rankin, Lei Sun | 2019-11-05 |
| 9547232 | Pellicle with aerogel support frame | Harry J. Levinson | 2017-01-17 |
| 9435921 | Blazed grating spectral purity filter and methods of making such a filter | Lei Sun | 2016-09-06 |
| 9436078 | Method for a low profile etchable EUV absorber layer with embedded particles in a photolithography mask | Lei Sun | 2016-09-06 |
| 9298081 | Scattering enhanced thin absorber for EUV reticle and a method of making | Lei Sun | 2016-03-29 |
| 9275449 | Methods and systems for determining a dose-to-clear of a photoresist | Lei Sun | 2016-03-01 |
| 9195132 | Mask structures and methods of manufacturing | Suraj K. Patil, SherJang Singh, Uzodinma Okoroanyanwu, Pawitter Mangat | 2015-11-24 |
| 8198611 | Laser beam formatting module and method for fabricating semiconductor dies using same | Bruno M. LaFontaine | 2012-06-12 |
| 7986146 | Method and system for detecting existence of an undesirable particle during semiconductor fabrication | Harry J. Levinson | 2011-07-26 |
| 7723704 | EUV pellicle with increased EUV light transmittance | Ryoung-Han Kim, Thomas I. Wallow | 2010-05-25 |
| 7671348 | Hydrocarbon getter for lithographic exposure tools | — | 2010-03-02 |
| 7663127 | EUV debris mitigation filter and method for fabricating semiconductor dies using same | Thomas I. Wallow, Ryoung-Han Kim | 2010-02-16 |
| 6847433 | Holder, system, and process for improving overlay in lithography | Donald L. White | 2005-01-25 |
| 5521031 | Pattern delineating apparatus for use in the EUV spectrum | Donald M. Tennant, Donald L. White | 1996-05-28 |
| 5510230 | Device fabrication using DUV/EUV pattern delineation | Donald M. Tennant, Donald L. White | 1996-04-23 |
| 5498923 | Fluoresence imaging | Bruno La Fontaine, Donald L. White | 1996-03-12 |
| 4583539 | Laser surgical system | David B. Karlin, Chandra K. N. Patel, Thomas J. Bridges, Albert R. Strnad | 1986-04-22 |
| 4504955 | Low voltage operation of arc discharge devices | John J. Macklin, William T. Silfvast | 1985-03-12 |
| 4498182 | Continuous wave sper laser | John J. Macklin, William T. Silfvast | 1985-02-05 |
| 4441189 | Foil electrode SPER light source | John J. Macklin, William T. Silfvast | 1984-04-03 |
| 4411733 | SPER Device for material working | John J. Macklin, William T. Silfvast | 1983-10-25 |
| 4395770 | Segmented plasma excitation-recombination light source | William T. Silfvast, Leo H. Szeto | 1983-07-26 |
| 4388720 | External control of recombination rate for electron-ion recombination lasers | William T. Silfvast, Leo H. Szeto | 1983-06-14 |
| 4369514 | Recombination laser | William T. Silfvast | 1983-01-18 |