Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802393 | Extreme ultraviolet (EUV) lithography mask | Lei Sun, Obert R. Wood, II, Genevieve Beique, Yulu Chen, Erik Verduijn | 2020-10-13 |
| 10622266 | Methods of identifying space within integrated circuit structure as mandrel space or non-mandrel space | Erik Verduijn, Genevieve Beique, Nicholas V. LiCausi, Lei Sun | 2020-04-14 |
| 10468149 | Extreme ultraviolet mirrors and masks with improved reflectivity | Yulu Chen, Jed H. Rankin, Lei Sun, Obert R. Wood, II | 2019-11-05 |