Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802393 | Extreme ultraviolet (EUV) lithography mask | Lei Sun, Obert R. Wood, II, Genevieve Beique, Erik Verduijn, Francis Goodwin | 2020-10-13 |
| 10564554 | System and method for analyzing printed masks for lithography based on representative contours | Liang Cao, Jed H. Rankin, Jie Zhang | 2020-02-18 |
| 10468149 | Extreme ultraviolet mirrors and masks with improved reflectivity | Francis Goodwin, Jed H. Rankin, Lei Sun, Obert R. Wood, II | 2019-11-05 |
| 10332745 | Dummy assist features for pattern support | Lei Sun, Ruilong Xie, Wenhui Wang, Erik Verduijn, Zhengqing John Qi +2 more | 2019-06-25 |
| 9911604 | Sidewall spacer pattern formation method | Lei Sun, Xunyuan Zhang, Ruilong Xie | 2018-03-06 |
| 9484258 | Method for producing self-aligned vias | Ryan Ryoung-Han Kim, Wenhui Wang, Lei Sun, Erik Verduijn | 2016-11-01 |
| 9478462 | SAV using selective SAQP/SADP | Wenhui Wang, Ryan Ryoung-Han Kim, Lei Sun, Erik Verduijn | 2016-10-25 |