| 6847433 |
Holder, system, and process for improving overlay in lithography |
Obert R. Wood, II |
2005-01-25 |
| 6379868 |
Lithographic process for device fabrication using dark-field illumination |
— |
2002-04-30 |
| 6042995 |
Lithographic process for device fabrication using a multilayer mask which has been previously inspected |
— |
2000-03-28 |
| RE35753 |
Optical lithographical imaging system including optical transmission diffraction devices |
Eric Raab, Sheila Vaidya |
1998-03-24 |
| 5654540 |
High resolution remote position detection using segmented gratings |
Stuart Stanton, George G. Zipfel, Jr. |
1997-08-05 |
| 5596413 |
Sub-micron through-the-lens positioning utilizing out of phase segmented gratings |
Stuart Stanton, George G. Zipfel, Jr. |
1997-01-21 |
| 5521031 |
Pattern delineating apparatus for use in the EUV spectrum |
Donald M. Tennant, Obert R. Wood, II |
1996-05-28 |
| 5510230 |
Device fabrication using DUV/EUV pattern delineation |
Donald M. Tennant, Obert R. Wood, II |
1996-04-23 |
| 5498923 |
Fluoresence imaging |
Bruno La Fontaine, Obert R. Wood, II |
1996-03-12 |
| 5439781 |
Device fabrication entailing synchrotron radiation |
Alastair A. MacDowell |
1995-08-08 |
| 5339346 |
Device fabrication entailing plasma-derived x-ray delineation |
— |
1994-08-16 |
| 5328842 |
Compounds, vectors and methods for expressing human, cytosolic phospholipase A.sub.2 |
Xue-Chiou C. Chiou, JoAnn Hoskins, Ruth M. Kramer, John D. Sharp |
1994-07-12 |
| 5320918 |
Optical lithographical imaging system including optical transmission diffraction devices |
Eric Raab, Sheila Vaidya |
1994-06-14 |
| 5229255 |
Sub-micron device fabrication with a phase shift mask having multiple values of phase delay |
— |
1993-07-20 |
| 5217831 |
Sub-micron device fabrication |
— |
1993-06-08 |
| 5091979 |
Sub-micron imaging |
— |
1992-02-25 |
| 5078534 |
Flush nut connectors |
— |
1992-01-07 |
| 4947413 |
Resolution doubling lithography technique |
Tatiana E. Jewell |
1990-08-07 |
| 4923301 |
Alignment of lithographic system |
— |
1990-05-08 |
| 4842311 |
Safety latch |
— |
1989-06-27 |
| 4614433 |
Mask-to-wafer alignment utilizing zone plates |
Martin Feldman, Peter Heimann, William A. Johnson, Theodore F. Retajczyk, Jr. |
1986-09-30 |
| 4398824 |
Wafer tilt compensation in zone plate alignment system |
Martin Feldman, Alan D. White |
1983-08-16 |
| 4326805 |
Method and apparatus for aligning mask and wafer members |
Martin Feldman, Alan D. White |
1982-04-27 |