Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7305333 | Projection electron beam lithography apparatus and method employing an estimator | — | 2007-12-04 |
| 7050957 | Projection electron beam lithography apparatus and method employing an estimator | — | 2006-05-23 |
| 6859324 | Optical demultiplexer/multiplexer architecture | Mark Marshall Meyers, David T. Neilson | 2005-02-22 |
| 6528799 | Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems | Victor Katsap, James A. Liddle, Masis Mkrtchyan | 2003-03-04 |
| 6469793 | Multi-channel grating interference alignment sensor | — | 2002-10-22 |
| 6177218 | Lithographic process for device fabrication using electron beam imaging | Joseph Allen Felker, James A. Liddle | 2001-01-23 |
| 5891605 | Reduction in damage to optical elements used in optical lithography for device fabrication | — | 1999-04-06 |
| 5684566 | Illumination system and method employing a deformable mirror and diffractive optical elements | — | 1997-11-04 |
| 5654540 | High resolution remote position detection using segmented gratings | Donald L. White, George G. Zipfel, Jr. | 1997-08-05 |
| 5631721 | Hybrid illumination system for use in photolithography | Gregg M. Gallatin, Mark Oskotsky, Frits Zernike | 1997-05-20 |
| 5596413 | Sub-micron through-the-lens positioning utilizing out of phase segmented gratings | Donald L. White, George G. Zipfel, Jr. | 1997-01-21 |