| 7305333 |
Projection electron beam lithography apparatus and method employing an estimator |
— |
2007-12-04 |
| 7050957 |
Projection electron beam lithography apparatus and method employing an estimator |
— |
2006-05-23 |
| 6859324 |
Optical demultiplexer/multiplexer architecture |
Mark Marshall Meyers, David T. Neilson |
2005-02-22 |
| 6528799 |
Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems |
Victor Katsap, James A. Liddle, Masis Mkrtchyan |
2003-03-04 |
| 6469793 |
Multi-channel grating interference alignment sensor |
— |
2002-10-22 |
| 6177218 |
Lithographic process for device fabrication using electron beam imaging |
Joseph Allen Felker, James A. Liddle |
2001-01-23 |
| 5891605 |
Reduction in damage to optical elements used in optical lithography for device fabrication |
— |
1999-04-06 |
| 5684566 |
Illumination system and method employing a deformable mirror and diffractive optical elements |
— |
1997-11-04 |
| 5654540 |
High resolution remote position detection using segmented gratings |
Donald L. White, George G. Zipfel, Jr. |
1997-08-05 |
| 5631721 |
Hybrid illumination system for use in photolithography |
Gregg M. Gallatin, Mark Oskotsky, Frits Zernike |
1997-05-20 |
| 5596413 |
Sub-micron through-the-lens positioning utilizing out of phase segmented gratings |
Donald L. White, George G. Zipfel, Jr. |
1997-01-21 |