Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977128 | Multi-layered semiconductor structure | David M. Boulin, Reginald Conway Farrow, Isik C. Kizilyalli, Nace Layadi | 2005-12-20 |
| 6706609 | Method of forming an alignment feature in or on a multi-layered semiconductor structure | David M. Boulin, Reginald Conway Farrow, Isik C. Kizilyalli, Nace Layadi | 2004-03-16 |
| 6576529 | Method of forming an alignment feature in or on a multilayered semiconductor structure | David M. Boulin, Reginald Conway Farrow, Isik C. Kizilyalli, Nace Layadi | 2003-06-10 |
| 6528799 | Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems | Victor Katsap, James A. Liddle, Stuart Stanton | 2003-03-04 |
| 6015644 | Process for device fabrication using a variable transmission aperture | Raymond A. Cirelli, Lee E. Trimble, George Patrick Watson, David L. Windt | 2000-01-18 |
| 5824441 | Lithographic process for device fabrication utilizing back-scattered electron beam signal intensity for alignment | Reginald Conway Farrow | 1998-10-20 |