| 6977128 |
Multi-layered semiconductor structure |
David M. Boulin, Reginald Conway Farrow, Isik C. Kizilyalli, Nace Layadi |
2005-12-20 |
| 6706609 |
Method of forming an alignment feature in or on a multi-layered semiconductor structure |
David M. Boulin, Reginald Conway Farrow, Isik C. Kizilyalli, Nace Layadi |
2004-03-16 |
| 6576529 |
Method of forming an alignment feature in or on a multilayered semiconductor structure |
David M. Boulin, Reginald Conway Farrow, Isik C. Kizilyalli, Nace Layadi |
2003-06-10 |
| 6528799 |
Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems |
Victor Katsap, James A. Liddle, Stuart Stanton |
2003-03-04 |
| 6015644 |
Process for device fabrication using a variable transmission aperture |
Raymond A. Cirelli, Lee E. Trimble, George Patrick Watson, David L. Windt |
2000-01-18 |
| 5824441 |
Lithographic process for device fabrication utilizing back-scattered electron beam signal intensity for alignment |
Reginald Conway Farrow |
1998-10-20 |