Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165834 | Method and apparatus for Schottky TFE inspection | — | 2024-12-10 |
| 12131883 | Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE) | Chising Lai | 2024-10-29 |
| 11901154 | Conical heat shield for electron emitting cathode | — | 2024-02-13 |
| 11823862 | Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE) | Chising Lai | 2023-11-21 |
| 11699564 | Schottky thermal field emitter with integrated beam splitter | — | 2023-07-11 |
| 11640896 | Method and apparatus for Schottky TFE inspection | — | 2023-05-02 |
| 11615938 | High-resolution multiple beam source | John G. Hartley | 2023-03-28 |
| 11562879 | Low-blur electrostatic transfer lens for multi-beam electron gun | — | 2023-01-24 |
| 10714311 | Individual beam detector for multiple beams, multi-beam irradiation apparatus, and individual beam detection method for multiple beams | Yoshikuni GOSHIMA, Rodney Kendall | 2020-07-14 |
| 10593505 | Low temperature, high-brightness, cathode | — | 2020-03-17 |
| 10573481 | Electron guns for electron beam tools | — | 2020-02-25 |
| 10553388 | High-brightness lanthanum hexaboride cathode and method for manufacturing of cathode | — | 2020-02-04 |
| 9790620 | Method of reducing work function in carbon coated LaB6 cathodes | — | 2017-10-17 |
| 9165737 | High-brightness, long life thermionic cathode and methods of its fabrication | — | 2015-10-20 |
| 7345290 | Lens array for electron beam lithography tool | Pieter Kruit, Daniel Moonen, Warren K. Waskiewicz | 2008-03-18 |
| 7179148 | Cathode with improved work function and method for making the same | Sungho Jin, Warren K. Waskiewicz, Wei Zhu | 2007-02-20 |
| 7176610 | High brightness thermionic cathode | — | 2007-02-13 |
| 6815876 | Cathode with improved work function and method for making the same | Sungho Jin, Warren K. Waskiewicz, Wei Zhu | 2004-11-09 |
| 6620565 | Electron beam lithography apparatus focused through spherical aberration introduction | Eric Munro, John Rouse, Warren K. Waskiewicz, Xieqing Zhu | 2003-09-16 |
| 6528799 | Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems | James A. Liddle, Masis Mkrtchyan, Stuart Stanton | 2003-03-04 |
| 6492647 | Electron guns for lithography tools | James A. Liddle, Warren K. Waskiewicz | 2002-12-10 |
| 6448569 | Bonded article having improved crystalline structure and work function uniformity and method for making the same | Warren K. Waskiewicz | 2002-09-10 |
| 6440620 | Electron beam lithography focusing through spherical aberration introduction | Eric Munro, John Rouse, Warren K. Waskiewicz, Xieqing Zhu | 2002-08-27 |
| 6420714 | Electron beam imaging apparatus | Eric Munro, John Rouse, Warren K. Waskiewicz, Xieqing Zhu | 2002-07-16 |
| 6400090 | Electron emitters for lithography tools | James A. Liddle, Warren K. Waskiewicz | 2002-06-04 |