Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8859395 | Techniques for curvature control in power transistor devices | Roger A. Fratti | 2014-10-14 |
| 7581203 | Method and apparatus for manufacturing multiple circuit patterns using a multiple project mask | Reginald Conway Farrow | 2009-08-25 |
| 7345290 | Lens array for electron beam lithography tool | Victor Katsap, Pieter Kruit, Daniel Moonen | 2008-03-18 |
| 7179148 | Cathode with improved work function and method for making the same | Sungho Jin, Victor Katsap, Wei Zhu | 2007-02-20 |
| 6815876 | Cathode with improved work function and method for making the same | Sungho Jin, Victor Katsap, Wei Zhu | 2004-11-09 |
| 6620565 | Electron beam lithography apparatus focused through spherical aberration introduction | Victor Katsap, Eric Munro, John Rouse, Xieqing Zhu | 2003-09-16 |
| 6492647 | Electron guns for lithography tools | Victor Katsap, James A. Liddle | 2002-12-10 |
| 6448569 | Bonded article having improved crystalline structure and work function uniformity and method for making the same | Victor Katsap | 2002-09-10 |
| 6440620 | Electron beam lithography focusing through spherical aberration introduction | Victor Katsap, Eric Munro, John Rouse, Xieqing Zhu | 2002-08-27 |
| 6420714 | Electron beam imaging apparatus | Victor Katsap, Eric Munro, John Rouse, Xieqing Zhu | 2002-07-16 |
| 6400090 | Electron emitters for lithography tools | Victor Katsap, James A. Liddle | 2002-06-04 |
| 6333508 | Illumination system for electron beam lithography tool | Victor Katsap, Pieter Kruit, Daniel Moonen | 2001-12-25 |
| 6324933 | Planar movable stage mechanism | Kurt Werder | 2001-12-04 |
| 6232040 | Method of electron beam exposure utilizing emitter with conductive mesh grid | Victor Katsap, James A. Liddle | 2001-05-15 |
| 5663568 | Apparatus for controlling a charged particle beam and a lithographic process in which the apparatus is used | — | 1997-09-02 |
| 5500312 | Masks with low stress multilayer films and a process for controlling the stress of multilayer films | Lloyd R. Harriott, James A. Liddle, Cynthia A. Volkert, David L. Windt | 1996-03-19 |
| 5356662 | Method for repairing an optical element which includes a multilayer coating | Kathleen R. Early, Donald M. Tennant, David L. Windt | 1994-10-18 |
| 5265143 | X-ray optical element including a multilayer coating | Kathleen R. Early, Richard E. Howard, Donald M. Tennant, David L. Windt | 1993-11-23 |