| 8859395 |
Techniques for curvature control in power transistor devices |
Roger A. Fratti |
2014-10-14 |
| 7581203 |
Method and apparatus for manufacturing multiple circuit patterns using a multiple project mask |
Reginald Conway Farrow |
2009-08-25 |
| 7345290 |
Lens array for electron beam lithography tool |
Victor Katsap, Pieter Kruit, Daniel Moonen |
2008-03-18 |
| 7179148 |
Cathode with improved work function and method for making the same |
Sungho Jin, Victor Katsap, Wei Zhu |
2007-02-20 |
| 6815876 |
Cathode with improved work function and method for making the same |
Sungho Jin, Victor Katsap, Wei Zhu |
2004-11-09 |
| 6620565 |
Electron beam lithography apparatus focused through spherical aberration introduction |
Victor Katsap, Eric Munro, John Rouse, Xieqing Zhu |
2003-09-16 |
| 6492647 |
Electron guns for lithography tools |
Victor Katsap, James A. Liddle |
2002-12-10 |
| 6448569 |
Bonded article having improved crystalline structure and work function uniformity and method for making the same |
Victor Katsap |
2002-09-10 |
| 6440620 |
Electron beam lithography focusing through spherical aberration introduction |
Victor Katsap, Eric Munro, John Rouse, Xieqing Zhu |
2002-08-27 |
| 6420714 |
Electron beam imaging apparatus |
Victor Katsap, Eric Munro, John Rouse, Xieqing Zhu |
2002-07-16 |
| 6400090 |
Electron emitters for lithography tools |
Victor Katsap, James A. Liddle |
2002-06-04 |
| 6333508 |
Illumination system for electron beam lithography tool |
Victor Katsap, Pieter Kruit, Daniel Moonen |
2001-12-25 |
| 6324933 |
Planar movable stage mechanism |
Kurt Werder |
2001-12-04 |
| 6232040 |
Method of electron beam exposure utilizing emitter with conductive mesh grid |
Victor Katsap, James A. Liddle |
2001-05-15 |
| 5663568 |
Apparatus for controlling a charged particle beam and a lithographic process in which the apparatus is used |
— |
1997-09-02 |
| 5500312 |
Masks with low stress multilayer films and a process for controlling the stress of multilayer films |
Lloyd R. Harriott, James A. Liddle, Cynthia A. Volkert, David L. Windt |
1996-03-19 |
| 5356662 |
Method for repairing an optical element which includes a multilayer coating |
Kathleen R. Early, Donald M. Tennant, David L. Windt |
1994-10-18 |
| 5265143 |
X-ray optical element including a multilayer coating |
Kathleen R. Early, Richard E. Howard, Donald M. Tennant, David L. Windt |
1993-11-23 |