Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026588 | Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical | Lawrence P. Muray, James Spallas, William Daniel Meisburger | 2018-07-17 |
| 7518732 | Multi-axis interferometer system using independent, single axis interferometers | William A. Eckes, Jeffrey Sullivan | 2009-04-14 |
| 7336369 | Multi-axis interferometer system using independent, single axis interferometers | William A. Eckes, Jeffrey Sullivan | 2008-02-26 |
| 6324933 | Planar movable stage mechanism | Warren K. Waskiewicz | 2001-12-04 |
| 5644137 | Stabilizing support mechanism for electron beam apparatus | Herbert A. Waggener | 1997-07-01 |