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Home › Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical

Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical

US Patent 10026588 · Granted Jul 17, 2018

Estimated economic value: $27,521,000 ⓘ

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