| 10026588 |
Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical |
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2018-07-17 |
| 7719753 |
Method of operation for SLM-based optical lithography tool |
— |
2010-05-18 |
| 7639416 |
Apparatus for SLM-based optical lithography with gray level capability |
— |
2009-12-29 |
| 7508570 |
Gray level method for slim-based optical lithography |
— |
2009-03-24 |
| 7295362 |
Continuous direct-write optical lithography |
— |
2007-11-13 |
| 7167296 |
Continuous direct-write optical lithography |
— |
2007-01-23 |
| 5057773 |
Method for opens/shorts testing of capacitively coupled networks in substrates using electron beams |
Steven D. Golladay, Fritz J. Hohn, David Hutson, Juergen Rasch |
1991-10-15 |
| 4943769 |
Apparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beams |
Steven D. Golladay, Fritz J. Hohn, David Hutson, Juergen Rasch |
1990-07-24 |
| 4330708 |
Electron lens |
— |
1982-05-18 |
