Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322568 | Auto-focus sensor implementation for multi-column microscopes | Nicholas Petrone, Alan D. Brodie | 2025-06-03 |
| 12211196 | Ensemble of deep learning models for defect review in high volume manufacturing | Kuljit S. Virk, Vera Andreeva | 2025-01-28 |
| 11699607 | Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons | John Gerling, Alan D. Brodie, James Spallas, Marcel Trimpl | 2023-07-11 |
| 11410830 | Defect inspection and review using transmissive current image of charged particle beam system | Hong Xiao, Nick Petrone, John Gerling, Abdurrahman Sezginer, Alan D. Brodie +3 more | 2022-08-09 |
| 11239048 | Arrayed column detector | Alan D. Brodie, John Fielden | 2022-02-01 |
| 10545099 | Ultra-high sensitivity hybrid inspection with full wafer coverage capability | Grace Hsiu-Ling Chen | 2020-01-28 |
| 10438769 | Array-based characterization tool | Alex Lipkind, Alon Rosenthal, Frank Chilese, John Gerling, Robert Haynes | 2019-10-08 |
| 10026588 | Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identical | Kurt Werder, James Spallas, William Daniel Meisburger | 2018-07-17 |
| 9099276 | High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope | Scott W. Indermuehle, James Spallas, Ying-Ju Wu, Dimitri Klyachko | 2015-08-04 |
| 8115168 | Layered scanning charged particle apparatus package having an embedded heater | James Spallas | 2012-02-14 |
| 8110801 | Layered scanning charged particle microscope package for a charged particle and radiation detector | Scott W. Indermuehle, Charles Silver, James Spallas | 2012-02-07 |
| 8106358 | Layered scanning charged particle microscope with differential pumping aperture | James Spallas | 2012-01-31 |
| 8003952 | Integrated deflectors for beam alignment and blanking in charged particle columns | James Spallas, Charles Silver | 2011-08-23 |
| 7335895 | Stacked lens structure and method of use thereof for preventing electrical breakdown | James Spallas | 2008-02-26 |
| 7332729 | System and method for multiple electron, ion, and photon beam alignment | James Spallas | 2008-02-19 |
| 7109486 | Layered electron beam column and method of use thereof | James Spallas | 2006-09-19 |
| 7045794 | Stacked lens structure and method of use thereof for preventing electrical breakdown | James Spallas | 2006-05-16 |
| 6805454 | MEMS structure with mechanical overdeflection limiter | Bryan P. Staker, James Spallas, Andres Fernandez | 2004-10-19 |
| 6791742 | MEMS structure with raised electrodes | Bryan P. Staker, Andres Fernandez | 2004-09-14 |
| 6693735 | MEMS structure with surface potential control | Bryan P. Staker, Andres Fernandez | 2004-02-17 |
| 6641273 | MEMS structure with mechanical overdeflection limiter | Bryan P. Staker, James Spallas, Andres Fernandez | 2003-11-04 |
| 6555829 | High precision flexure stage | James Spallas, David Trost, Ho Seob Kim, Tai-Hon Philip Chang | 2003-04-29 |
| 6369385 | Integrated microcolumn and scanning probe microscope arrays | Ho Seob Kim, T. H. Philip Chang | 2002-04-09 |
| 6288401 | Electrostatic alignment of a charged particle beam | Tai-Hon Philip Chang, Marian Mankos, Ho Seob Kim, Kim Y. Lee | 2001-09-11 |
| 6195214 | Microcolumn assembly using laser spot welding | Kim Y. Lee, Stephen A. Rishton, Ho Seob Kim, Tai-Hon Philip Chang | 2001-02-27 |