Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6717146 | Tandem microchannel plate and solid state electron detector | Stuart L. Friedman, Ming Lun Yu | 2004-04-06 |
| 6555829 | High precision flexure stage | James Spallas, Lawrence P. Muray, David Trost, Ho Seob Kim | 2003-04-29 |
| 6555830 | Suppression of emission noise for microcolumn applications in electron beam inspection | Marian Mankos, Kim Y. Lee, Ming Lun Yu | 2003-04-29 |
| 6429443 | Multiple beam electron beam lithography system | Marian Mankos, Steven Thomas Coyle, Andres Fernandez | 2002-08-06 |
| 6376984 | Patterned heat conducting photocathode for electron beam source | Andres Fernandez, Marian Mankos, Kim Y. Lee, Steven Thomas Coyle | 2002-04-23 |
| 6376985 | Gated photocathode for controlled single and multiple electron beam emission | Kim Y. Lee, Marian Mankos, C. Neil Berglund | 2002-04-23 |
| 6288401 | Electrostatic alignment of a charged particle beam | Marian Mankos, Lawrence P. Muray, Ho Seob Kim, Kim Y. Lee | 2001-09-11 |
| 6281508 | Precision alignment and assembly of microlenses and microcolumns | Kim Y. Lee, Ho Seob Kim, Stephen A. Rishton | 2001-08-28 |
| 6220914 | Method of forming gated photocathode for controlled single and multiple electron beam emission | Kim Y. Lee, Marian Mankos, C. Neil Berglund | 2001-04-24 |
| 6195214 | Microcolumn assembly using laser spot welding | Lawrence P. Muray, Kim Y. Lee, Stephen A. Rishton, Ho Seob Kim | 2001-02-27 |
| 6145438 | Method and apparatus for direct writing of semiconductor die using microcolumn array | C. Neil Berglund | 2000-11-14 |
| 6127738 | Detecting registration marks with low energy electron beam | Hoseob Kim | 2000-10-03 |
| 6023060 | T-shaped electron-beam microcolumn as a general purpose scanning electron microscope | Ho Seob Kim | 2000-02-08 |
| 6011269 | Shaped shadow projection for an electron beam column | Lee H. Veneklasen, Marian Mankos | 2000-01-04 |
| 6008060 | Detecting registration marks with a low energy electron beam | Hoseob Kim | 1999-12-28 |
| 5155412 | Method for selectively scaling a field emission electron gun and device formed thereby | Dieter Kern, Lawrence P. Muray | 1992-10-13 |
| 5122663 | Compact, integrated electron beam imaging system | Harry Jonathon Mamin, Daniel Rugar | 1992-06-16 |
| 4621232 | Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure | Philip J. Coane, Fritz J. Hohn, Walter W. Molzen, Jr., Arthur R. Zingher | 1986-11-04 |
| 4477729 | Continuously writing electron beam stitched pattern exposure system | Alan D. Wilson | 1984-10-16 |
| 4426583 | Electron beam potential switching apparatus | Phillip J. Coane, Fritz J. Hohn, Dieter Kern | 1984-01-17 |