Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10618925 | Tungsten precursor | Sam Lee, Jong Taik Lee, Jun-Young Lee | 2020-04-14 |
| 9837245 | Micro stage for particle beam column using piezo elements as actuator | Byeng Jin Kim, Do Jin Seong | 2017-12-05 |
| 9673016 | Micro-electron column having an electron emitter improving the density of an electron beam emitted from a nano structure tip | Tae-Sik Oh, Dae Wook Kim, Hyung Woo Kim, Seung Jun Ahn | 2017-06-06 |
| 9666407 | Electrostatic quadrupole deflector for microcolumn | Tae-Sik Oh, Dae Wook Kim | 2017-05-30 |
| 9196454 | Micro-column with double aligner | Tae-Sik Oh, Dae Wook Kim, Seung-Joon Ahn | 2015-11-24 |
| 8912506 | Device for sustaining differential vacuum degrees for electron column | — | 2014-12-16 |
| 8890092 | Multi-particle beam column having an electrode layer including an eccentric aperture | Dae Wook Kim, Seung Jun Ahn, Tae-Sik Oh | 2014-11-18 |
| 8835848 | Ultra-miniaturized electron optical microcolumn | Tae-Sik Oh, Dae Wook Kim, Seung-Joon Ahn | 2014-09-16 |
| 8324573 | Detector for electron column and method for detecting electrons for electron column | — | 2012-12-04 |
| 8173978 | Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same | Byeng Jin Kim | 2012-05-08 |
| 8071944 | Portable electron microscope using micro-column | Byeng Jin Kim | 2011-12-06 |
| 8071955 | Magnetic deflector for an electron column | Young Chul Kim | 2011-12-06 |
| 8044351 | Micro-column with simple structure | Byeng Jin Kim | 2011-10-25 |
| 7968844 | Hole inspection apparatus and hole inspection method using the same | — | 2011-06-28 |
| 7935926 | Inspection equipment for fine pattern and morphology using microcolumn | — | 2011-05-03 |
| 7902521 | Method for focusing electron beam in electron column | Seung-Joon Ahn, Dae Wook Kim, Young Chul Kim | 2011-03-08 |
| 7598594 | Wafer-scale microcolumn array using low temperature co-fired ceramic substrate | Jin Woo Jeong, Dae Jun Kim, Sang Kuk Choi, Dae-Yong Kim | 2009-10-06 |
| 7394071 | Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate | Dae Jun Kim, Jin Woo Jeong, Sang Kuk Choi, Dae-Yong Kim | 2008-07-01 |
| 7329878 | Method for manufacturing a lens assembly of microcolumn and lens assembly of microcolumn manufactured by the same | — | 2008-02-12 |
| 6555829 | High precision flexure stage | James Spallas, Lawrence P. Muray, David Trost, Tai-Hon Philip Chang | 2003-04-29 |
| 6369385 | Integrated microcolumn and scanning probe microscope arrays | Lawrence P. Muray, T. H. Philip Chang | 2002-04-09 |
| 6297584 | Precision alignment of microcolumn tip to a micron-size extractor aperture | Kim Y. Lee, T. H. Philip Chang | 2001-10-02 |
| 6288401 | Electrostatic alignment of a charged particle beam | Tai-Hon Philip Chang, Marian Mankos, Lawrence P. Muray, Kim Y. Lee | 2001-09-11 |
| 6281508 | Precision alignment and assembly of microlenses and microcolumns | Kim Y. Lee, Stephen A. Rishton, Tai-Hon Philip Chang | 2001-08-28 |
| 6195214 | Microcolumn assembly using laser spot welding | Lawrence P. Muray, Kim Y. Lee, Stephen A. Rishton, Tai-Hon Philip Chang | 2001-02-27 |