Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713408 | Method of producing silica micro-structures from x-ray lithography of SOG materials | Vijay-Anandh Shanmugam, Michael Vasile | 2004-03-30 |
| 6482553 | Graphite mask for x-ray or deep x-ray lithography | Jost S. Göttert, Kevin Kelly | 2002-11-19 |
| 4621232 | Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure | Tai-Hon Philip Chang, Fritz J. Hohn, Walter W. Molzen, Jr., Arthur R. Zingher | 1986-11-04 |
| 4341850 | Mask structure for forming semiconductor devices, comprising electron-sensitive resist patterns with controlled line profiles | — | 1982-07-27 |
| 4283483 | Process for forming semiconductor devices using electron-sensitive resist patterns with controlled line profiles | — | 1981-08-11 |