Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924494 | Method of exposing a target to a charged particle beam | William J. DeVore | 2005-08-02 |
| 6828570 | Technique for writing with a raster scanned beam | Stephen A. Rishton, Stacey Winter, Volker Boegli, Huei Kao | 2004-12-07 |
| 6803572 | Apparatus and methods for secondary electron emission microscope with dual beam | David L. Adler | 2004-10-12 |
| 6768117 | Immersion lens with magnetic shield for charged particle beam system | William J. DeVore | 2004-07-27 |
| 6720565 | Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography | Robert A. Innes, Sergey Babin, Robin L. Teitzel | 2004-04-13 |
| 6610980 | Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams | David L. Adler, Matthew S. Marcus | 2003-08-26 |
| 6586733 | Apparatus and methods for secondary electron emission microscope with dual beam | David L. Adler | 2003-07-01 |
| 6563124 | Electron beam apparatus having traversing circuit boards | Vidhya Krishnamurthi, Gil I. Winograd | 2003-05-13 |
| 6541770 | Charged particle system error diagnosis | — | 2003-04-01 |
| 6515282 | Testing of interconnection circuitry using two modulated charged particle beams | Juan R. Maldonado | 2003-02-04 |
| 6476401 | Moving photocathode with continuous regeneration for image conversion in electron beam lithography | Marian Mankos, Bart Scholte van Mast | 2002-11-05 |
| 6465795 | Charge neutralization of electron beam systems | Juan R. Madonado, Matthias Brunner, Ralf Schmid | 2002-10-15 |
| 6455863 | Apparatus and method for forming a charged particle beam of arbitrary shape | Sergey Babin | 2002-09-24 |
| 6392333 | Electron gun having magnetic collimator | William J. DeVore, Rudy F. Garcia | 2002-05-21 |
| 6373071 | Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography | Robert A. Innes, Sergey Babin, Robin L. Teitzel | 2002-04-16 |
| 6326635 | Minimization of electron fogging in electron beam lithography | Robert A. Innes, Allan L. Sagle, Sergey Babin, Chen Hwa | 2001-12-04 |
| 6300630 | Annular differential seal for electron beam apparatus using isolation valve and additional differential pumping | — | 2001-10-09 |
| 6274290 | Raster scan gaussian beam writing strategy and method for pattern generation | William J. DeVore | 2001-08-14 |
| 6262429 | Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash field | Stephen A. Rishton, Jeffery K. Varner, Allan L. Sagle, Weidong Wang | 2001-07-17 |
| 6259106 | Apparatus and method for controlling a beam shape | Volker Boegli, Stephen A. Rishton | 2001-07-10 |
| 6215128 | Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithography | Marian Mankos | 2001-04-10 |
| 6011269 | Shaped shadow projection for an electron beam column | Tai-Hon Philip Chang, Marian Mankos | 2000-01-04 |
| 6002135 | Magnetic lens and deflector with inner and outer pole pieces with conical inner pole piece | William J. DeVore | 1999-12-14 |
| 5900667 | Operating a solid state particle detector within a magnetic deflection field so as to minimize eddy currents | Rudy F. Garcia | 1999-05-04 |
| 5876902 | Raster shaped beam writing strategy system and method for pattern generation | William J. DeVore, R. L. Smith, Robin L. Teitzel | 1999-03-02 |