Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7800075 | Multi-function module for an electron beam column | Benyamin Buller, Juergen Frosien, Xinrong Jiang, Richard L. Lozes, Henry Pearce-Percy +3 more | 2010-09-21 |
| 7514682 | Electron anti-fogging baffle used as a detector | Benyamin Buller, Juergen Frosien, Richard L. Lozes, Henry Pearce-Percy, Dieter Winkler | 2009-04-07 |
| 7427765 | Electron beam column for writing shaped electron beams | Benyamin Buller, Juergen Frosien, Xinrong Jiang, Richard L. Lozes, Henry Pearce-Percy +3 more | 2008-09-23 |
| 7372195 | Electron beam source having an extraction electrode provided with a magnetic disk element | Steven Thomas Coyle, Michael R. Scheinfein | 2008-05-13 |
| 7315029 | Electrostatic deflection system with low aberrations and vertical beam incidence | Dieter Winkler, Henry Pearce-Percy, Juergen Frosien | 2008-01-01 |
| 7227155 | Electrostatic deflection system with impedance matching for high positioning accuracy | Benyamin Buller, Juergen Frosien, Eugene Mirro, Henry Pearce-Percy, Dieter Winkler | 2007-06-05 |
| 6924494 | Method of exposing a target to a charged particle beam | Lee H. Veneklasen | 2005-08-02 |
| 6828996 | Electron beam patterning with a heated electron source | Glen E. Howard | 2004-12-07 |
| 6768117 | Immersion lens with magnetic shield for charged particle beam system | Lee H. Veneklasen | 2004-07-27 |
| 6521896 | Blanker assembly employing dielectric material | Michael Penberth | 2003-02-18 |
| 6392333 | Electron gun having magnetic collimator | Lee H. Veneklasen, Rudy F. Garcia | 2002-05-21 |
| 6274290 | Raster scan gaussian beam writing strategy and method for pattern generation | Lee H. Veneklasen | 2001-08-14 |
| 6002135 | Magnetic lens and deflector with inner and outer pole pieces with conical inner pole piece | Lee H. Veneklasen | 1999-12-14 |
| 5876902 | Raster shaped beam writing strategy system and method for pattern generation | Lee H. Veneklasen, R. L. Smith, Robin L. Teitzel | 1999-03-02 |
| 5729022 | Composite concentric-gap magnetic lens and deflector with conical pole pieces | Lee H. Veneklasen | 1998-03-17 |
| 5376505 | Device fabrication entailing submicron imaging | Steven Berger | 1994-12-27 |
| 4987311 | Electron-detector diode biassing scheme for improved writing by an electron beam lithography machine | — | 1991-01-22 |
| 4469948 | Composite concentric-gap magnetic lens | Lee H. Veneklasen | 1984-09-04 |