Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Immersion lens with magnetic shield for charged particle beam system

Immersion lens with magnetic shield for charged particle beam system

US Patent 6768117 · Granted Jul 27, 2004

Estimated economic value: $69,155,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-function module for an electron beam column2010
Electron anti-fogging baffle used as a detector2009
Electron beam column for writing shaped electron beams2008
Electron beam source having an extraction electrode provided with a magnetic dis2008
Electrostatic deflection system with low aberrations and vertical beam incidence2008
Electrostatic deflection system with impedance matching for high positioning acc2007
Method of exposing a target to a charged particle beam2005
Method of exposing a target to a charged particle beam2005
Technique for writing with a raster scanned beam2004
Electron beam patterning with a heated electron source2004
Apparatus and methods for secondary electron emission microscope with dual beam2004
Real-time prediction of and correction of proximity resist heating in raster sca2004