Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Composite concentric-gap magnetic lens and deflector with conical pole pieces

Composite concentric-gap magnetic lens and deflector with conical pole pieces

US Patent 5729022 · Granted Mar 17, 1998

Estimated economic value: $16,789,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-function module for an electron beam column2010
Electron anti-fogging baffle used as a detector2009
Electron beam column for writing shaped electron beams2008
Electron beam source having an extraction electrode provided with a magnetic dis2008
Electrostatic deflection system with low aberrations and vertical beam incidence2008
Electrostatic deflection system with impedance matching for high positioning acc2007
Method of exposing a target to a charged particle beam2005
Method of exposing a target to a charged particle beam2005
Technique for writing with a raster scanned beam2004
Electron beam patterning with a heated electron source2004
Apparatus and methods for secondary electron emission microscope with dual beam2004
Immersion lens with magnetic shield for charged particle beam system2004