Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7961912 | Method and apparatus for dynamic space-time imaging system | Glen Stevick, David Rondinone, Jerome R. Singer | 2011-06-14 |
| 6724002 | Multiple electron beam lithography system with multiple beam modulated laser illumination | Marian Mankos, Steven Thomas Coyle, Andres Fernandez, Paul C. Allen, Xiaolan Chen +5 more | 2004-04-20 |
| 6326635 | Minimization of electron fogging in electron beam lithography | Robert A. Innes, Lee H. Veneklasen, Sergey Babin, Chen Hwa | 2001-12-04 |
| 6262429 | Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash field | Stephen A. Rishton, Jeffery K. Varner, Lee H. Veneklasen, Weidong Wang | 2001-07-17 |