Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9964453 | Device and method for high precision fiber-optic temperature profile measurements in long length areas | Alexey Kuznetsov, Ivan S. Shelemba | 2018-05-08 |
| 7786403 | Method for high-resolution processing of thin layers using electron beams | Hans Koops, Klaus Edinger, Thorsten Hofmann, Petra Spies | 2010-08-31 |
| 6720565 | Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography | Robert A. Innes, Robin L. Teitzel, Lee H. Veneklasen | 2004-04-13 |
| 6455863 | Apparatus and method for forming a charged particle beam of arbitrary shape | Lee H. Veneklasen | 2002-09-24 |
| 6420717 | Method and apparatus for real-time correction of resist heating in lithography | Robert A. Innes | 2002-07-16 |
| 6373071 | Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography | Robert A. Innes, Robin L. Teitzel, Lee H. Veneklasen | 2002-04-16 |
| 6326635 | Minimization of electron fogging in electron beam lithography | Robert A. Innes, Lee H. Veneklasen, Allan L. Sagle, Chen Hwa | 2001-12-04 |
| 5847959 | Method and apparatus for run-time correction of proximity effects in pattern generation | Lee H. Veneklasen, Robert A. Innes, David Trost, Jeffrey A. Varner | 1998-12-08 |