Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and method for forming a charged particle beam of arbitrary shape

Apparatus and method for forming a charged particle beam of arbitrary shape

US Patent 6455863 · Granted Sep 24, 2002

Estimated economic value: $13,765,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Device and method for high precision fiber-optic temperature profile measurement2018
Method for high-resolution processing of thin layers using electron beams2010
Method of exposing a target to a charged particle beam2005
Technique for writing with a raster scanned beam2004
Apparatus and methods for secondary electron emission microscope with dual beam2004
Immersion lens with magnetic shield for charged particle beam system2004
Real-time prediction of and correction of proximity resist heating in raster sca2004
Real-time prediction of and correction of proximity resist heating in raster sca2004
Apparatus for inspection of semiconductor wafers and masks using a low energy el2003
Apparatus and methods for secondary electron emission microscope with dual beam2003
Electron beam apparatus having traversing circuit boards2003
Charged particle system error diagnosis2003