Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle system error diagnosis

Charged particle system error diagnosis

US Patent 6541770 · Granted Apr 1, 2003

Estimated economic value: $20,539,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of exposing a target to a charged particle beam2005
Technique for writing with a raster scanned beam2004
Apparatus and methods for secondary electron emission microscope with dual beam2004
Immersion lens with magnetic shield for charged particle beam system2004
Real-time prediction of and correction of proximity resist heating in raster sca2004
Apparatus for inspection of semiconductor wafers and masks using a low energy el2003
Apparatus and methods for secondary electron emission microscope with dual beam2003
Electron beam apparatus having traversing circuit boards2003
Testing of interconnection circuitry using two modulated charged particle beams2003
Moving photocathode with continuous regeneration for image conversion in electro2002
Charge neutralization of electron beam systems2002
Apparatus and method for forming a charged particle beam of arbitrary shape2002