Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292680 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Tristan Bret | 2025-05-06 |
| 12164226 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Tristan Bret | 2024-12-10 |
| 11886126 | Apparatus and method for removing a single particulate from a substrate | Christian Felix Hermanns, Tilo Sielaff, Jens Oster, Christof Baur, Maksym Kompaniiets | 2024-01-30 |
| 11874598 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Tristan Bret | 2024-01-16 |
| 11733186 | Device and method for analyzing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Christof Baur, Thorsten Hofmann, Michael Budach | 2023-08-22 |
| 10983075 | Device and method for analysing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Christof Baur, Thorsten Hofmann, Michael Budach | 2021-04-20 |
| 10119990 | Scanning probe microscope and method for examining a surface with a high aspect ratio | Christof Baur | 2018-11-06 |
| 10060947 | Method and apparatus for analyzing and for removing a defect of an EUV photomask | Michael Budach, Tristan Bret, Thorsten Hofmann | 2018-08-28 |
| 9910065 | Apparatus and method for examining a surface of a mask | Michael Budach, Thorsten Hofmann, Pawel Szych, Gabriel Baralia | 2018-03-06 |
| 9236225 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2016-01-12 |
| 9186630 | Perforated membranes | Armin Gölzhäuser | 2015-11-17 |
| 9115981 | Apparatus and method for investigating an object | Christof Baur, Thorsten Hofmann, Gabriel Baralia, Michael Budach | 2015-08-25 |
| 9023666 | Method for electron beam induced etching | Nicole Auth, Petra Spies, Rainer Becker, Thorsten Hofmann | 2015-05-05 |
| 9012867 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2015-04-21 |
| 8769709 | Apparatus and method for analyzing and modifying a specimen surface | Christof Baur, Thorsten Hofmann, Gabriel Baralia | 2014-07-01 |
| 8748845 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2014-06-10 |
| 8674329 | Method and apparatus for analyzing and/or repairing of an EUV mask defect | Michael Budach, Tristan Bret, Thorsten Hofmann, Heiko Feldmann, Johannes Ruoff | 2014-03-18 |
| 8632687 | Method for electron beam induced etching of layers contaminated with gallium | Nicole Auth, Petra Spies, Rainer Becker, Thorsten Hofmann | 2014-01-21 |
| 8623230 | Methods and systems for removing a material from a sample | Nicole Auth, Petra Spies, Tristan Bret, Rainer Becker, Thorsten Hofmann | 2014-01-07 |
| 8318593 | Method for electron beam induced deposition of conductive material | Nicole Auth, Petra Spies, Rainer Becker, Thorsten Hofmann | 2012-11-27 |
| 8247782 | Apparatus and method for investigating and/or modifying a sample | Rainer Becker, Michael Budach, Thorsten Hofmann | 2012-08-21 |
| 8110814 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2012-02-07 |
| 7786403 | Method for high-resolution processing of thin layers using electron beams | Hans Koops, Sergey Babin, Thorsten Hofmann, Petra Spies | 2010-08-31 |
| 7537708 | Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface | Hans Wilfried Peter Koops | 2009-05-26 |
| 7485873 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +3 more | 2009-02-03 |