Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405289 | Device and method for operating a bending beam in a closed control loop | Florian Demski | 2025-09-02 |
| 12292680 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Klaus Edinger, Tristan Bret | 2025-05-06 |
| 12164226 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Klaus Edinger, Tristan Bret | 2024-12-10 |
| 11977097 | Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope | Gabriel Baralia, Rainer Becker, Kinga Kornilov, Hans Hermann Pieper | 2024-05-07 |
| 11965910 | Device and method for operating a bending beam in a closed control loop | Florian Demski | 2024-04-23 |
| 11899359 | Method and apparatus for removing a particle from a photolithographic mask | Hans Hermann Pieper | 2024-02-13 |
| 11886126 | Apparatus and method for removing a single particulate from a substrate | Klaus Edinger, Christian Felix Hermanns, Tilo Sielaff, Jens Oster, Maksym Kompaniiets | 2024-01-30 |
| 11874598 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Klaus Edinger, Tristan Bret | 2024-01-16 |
| 11796563 | Apparatus and method for a scanning probe microscope | Ulrich Matejka | 2023-10-24 |
| 11733186 | Device and method for analyzing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Klaus Edinger, Thorsten Hofmann, Michael Budach | 2023-08-22 |
| 11680963 | Method and apparatus for examining a measuring tip of a scanning probe microscope | Kinga Kornilov, Markus Bauer | 2023-06-20 |
| 11630124 | Device and method for operating a bending beam in a closed control loop | Florian Demski | 2023-04-18 |
| 11592461 | Apparatus and method for examining and/or processing a sample | Michael Budach | 2023-02-28 |
| 11429020 | Method and apparatus for removing a particle from a photolithographic mask | Hans Hermann Pieper | 2022-08-30 |
| 11353478 | Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope | Gabriel Baralia, Rainer Becker, Kinga Kornilov, Hans Hermann Pieper | 2022-06-07 |
| 11262378 | Apparatus and method for examining and/or processing a sample | Michael Budach | 2022-03-01 |
| 11237187 | Method and apparatus for examining a measuring tip of a scanning probe microscope | Kinga Kornilov, Markus Bauer | 2022-02-01 |
| 11237185 | Apparatus and method for a scanning probe microscope | Ulrich Matejka | 2022-02-01 |
| 11054439 | Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode | — | 2021-07-06 |
| 10983075 | Device and method for analysing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Klaus Edinger, Thorsten Hofmann, Michael Budach | 2021-04-20 |
| 10578644 | Probe system and method for receiving a probe of a scanning probe microscope | Sylvio Ruhm, Gabriel Baralia, Christoph Pohl, Björn Harnath, Matthias Weber | 2020-03-03 |
| 10410820 | Beam blanker and method for blanking a charged particle beam | Michael Budach | 2019-09-10 |
| 10119990 | Scanning probe microscope and method for examining a surface with a high aspect ratio | Klaus Edinger | 2018-11-06 |
| 9995764 | Method and apparatus for avoiding damage when analysing a sample surface with a scanning probe microscope | Hans Hermann Pieper, Rainer Fettig | 2018-06-12 |
| 9336983 | Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope | Michael Budach, Dajana Cujas, Robert Heberlein, Marion Batz | 2016-05-10 |