Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292680 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Klaus Edinger | 2025-05-06 |
| 12164226 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Klaus Edinger | 2024-12-10 |
| 11874598 | Method and apparatuses for disposing of excess material of a photolithographic mask | Michael Budach, Christof Baur, Klaus Edinger | 2024-01-16 |
| 10732501 | Method and device for permanently repairing defects of absent material of a photolithographic mask | Jens Oster, Kinga Kornilov, Horst Schneider, Thorsten Hofmann | 2020-08-04 |
| 10372032 | Method and device for permanently repairing defects of absent material of a photolithographic mask | Jens Oster, Kinga Kornilov, Horst Schneider, Thorsten Hofmann | 2019-08-06 |
| 10060947 | Method and apparatus for analyzing and for removing a defect of an EUV photomask | Michael Budach, Klaus Edinger, Thorsten Hofmann | 2018-08-28 |
| 9909218 | Beam-induced etching | Patrik Hoffmann, Michel Rossi, Xavier Multone | 2018-03-06 |
| 9721754 | Method and apparatus for processing a substrate with a focused particle beam | Petra Spies, Thorsten Hofmann | 2017-08-01 |
| 8674329 | Method and apparatus for analyzing and/or repairing of an EUV mask defect | Michael Budach, Klaus Edinger, Thorsten Hofmann, Heiko Feldmann, Johannes Ruoff | 2014-03-18 |
| 8623230 | Methods and systems for removing a material from a sample | Nicole Auth, Petra Spies, Rainer Becker, Thorsten Hofmann, Klaus Edinger | 2014-01-07 |
| 7670956 | Beam-induced etching | Patrik Hoffmann, Michel Rossi, Xavier Multone | 2010-03-02 |
| 7514188 | Process for providing marking on security papers | Patrik Hoffmann, Vincent Moreau | 2009-04-07 |