Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961705 | Method and apparatus for examining a beam of charged particles | Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Marion Batz +3 more | 2024-04-16 |
| 9721754 | Method and apparatus for processing a substrate with a focused particle beam | Tristan Bret, Thorsten Hofmann | 2017-08-01 |
| 9023666 | Method for electron beam induced etching | Nicole Auth, Rainer Becker, Thorsten Hofmann, Klaus Edinger | 2015-05-05 |
| 8632687 | Method for electron beam induced etching of layers contaminated with gallium | Nicole Auth, Rainer Becker, Thorsten Hofmann, Klaus Edinger | 2014-01-21 |
| 8623230 | Methods and systems for removing a material from a sample | Nicole Auth, Tristan Bret, Rainer Becker, Thorsten Hofmann, Klaus Edinger | 2014-01-07 |
| 8318593 | Method for electron beam induced deposition of conductive material | Nicole Auth, Rainer Becker, Thorsten Hofmann, Klaus Edinger | 2012-11-27 |
| 7786403 | Method for high-resolution processing of thin layers using electron beams | Hans Koops, Klaus Edinger, Sergey Babin, Thorsten Hofmann | 2010-08-31 |