Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961705 | Method and apparatus for examining a beam of charged particles | Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Katharina Gries +3 more | 2024-04-16 |
| 9336983 | Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope | Michael Budach, Christof Baur, Dajana Cujas, Robert Heberlein | 2016-05-10 |