Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292680 | Method and apparatuses for disposing of excess material of a photolithographic mask | Christof Baur, Klaus Edinger, Tristan Bret | 2025-05-06 |
| 12164226 | Method and apparatuses for disposing of excess material of a photolithographic mask | Christof Baur, Klaus Edinger, Tristan Bret | 2024-12-10 |
| 12135540 | Devices and methods for examining and/or processing an element for photolithography | Nicole Auth, Christian Rensing, Alexander Freytag, Christian Wojek | 2024-11-05 |
| 11874598 | Method and apparatuses for disposing of excess material of a photolithographic mask | Christof Baur, Klaus Edinger, Tristan Bret | 2024-01-16 |
| 11733186 | Device and method for analyzing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Christof Baur, Klaus Edinger, Thorsten Hofmann | 2023-08-22 |
| 11650495 | Apparatus and method for determining a position of an element on a photolithographic mask | Nicole Auth | 2023-05-16 |
| 11592461 | Apparatus and method for examining and/or processing a sample | Christof Baur | 2023-02-28 |
| 11385540 | Apparatus and method for determining a position of an element on a photolithographic mask | Nicole Auth | 2022-07-12 |
| 11262378 | Apparatus and method for examining and/or processing a sample | Christof Baur | 2022-03-01 |
| 11256168 | Apparatus and method for repairing a photolithographic mask | Ottmar Hoinkis | 2022-02-22 |
| 11170970 | Methods and devices for examining an electrically charged specimen surface | Michael Schnell, Bernd Schindler, Markus Boese | 2021-11-09 |
| 11150552 | Method and apparatus for analyzing a defective location of a photolithographic mask | Ralf Schönberger | 2021-10-19 |
| 10983075 | Device and method for analysing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Christof Baur, Klaus Edinger, Thorsten Hofmann | 2021-04-20 |
| 10410820 | Beam blanker and method for blanking a charged particle beam | Christof Baur | 2019-09-10 |
| 10068747 | Methods and devices for examining an electrically charged specimen surface | Michael Schnell, Bernd Schindler, Markus Boese | 2018-09-04 |
| 10060947 | Method and apparatus for analyzing and for removing a defect of an EUV photomask | Tristan Bret, Klaus Edinger, Thorsten Hofmann | 2018-08-28 |
| 9910065 | Apparatus and method for examining a surface of a mask | Thorsten Hofmann, Klaus Edinger, Pawel Szych, Gabriel Baralia | 2018-03-06 |
| 9863760 | Method and device for determining a reference point of an orientation marking on a substrate of a photolithographic mask in an automated manner | Ralf Schönberger, Michael R. Jost | 2018-01-09 |
| 9431212 | Method for determining the performance of a photolithographic mask | Markus Waiblinger, Thomas Scherübl, Dirk Beyer | 2016-08-30 |
| 9336983 | Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope | Christof Baur, Dajana Cujas, Robert Heberlein, Marion Batz | 2016-05-10 |
| 9115981 | Apparatus and method for investigating an object | Christof Baur, Klaus Edinger, Thorsten Hofmann, Gabriel Baralia | 2015-08-25 |
| 8674329 | Method and apparatus for analyzing and/or repairing of an EUV mask defect | Tristan Bret, Klaus Edinger, Thorsten Hofmann, Heiko Feldmann, Johannes Ruoff | 2014-03-18 |
| 8316698 | Determining a repairing form of a defect at or close to an edge of a substrate of a photo mask | — | 2012-11-27 |
| 8247782 | Apparatus and method for investigating and/or modifying a sample | Klaus Edinger, Rainer Becker, Thorsten Hofmann | 2012-08-21 |
| 8058614 | Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof | Johannes Bihr, Friedhelm Panteleit, Tobias Clauss | 2011-11-15 |