Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058614 | Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof | Johannes Bihr, Tobias Clauss, Michael Budach | 2011-11-15 |
| 7645989 | Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof | Johannes Bihr, Tobias Clauss, Michael Budach | 2010-01-12 |