Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058614 | Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof | Friedhelm Panteleit, Tobias Clauss, Michael Budach | 2011-11-15 |
| 7645989 | Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof | Friedhelm Panteleit, Tobias Clauss, Michael Budach | 2010-01-12 |
| 7521693 | Ion sources, systems and methods | Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +1 more | 2009-04-21 |
| 7285780 | Detector system for a scanning electron microscope and a scanning electron microscope incorporating said detector system | Heiner Jaksch | 2007-10-23 |
| 7060978 | Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system | Volker Drexel, Gerd Benner, Stephan Kujawa | 2006-06-13 |
| 6239430 | Particle beam apparatus with energy filter | Eugen Weimer | 2001-05-29 |
| 5177361 | Electron energy filter | Dieter Krahl, Hans-Joachim Pätzold, Albrecht Rilk | 1993-01-05 |
| 5134339 | High-voltage lead-through for particle-beam apparatus | Dietrich Hoffmeister, Harald Niebel | 1992-07-28 |