Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446360 | Particle source for producing a particle beam and particle-optical apparatus | Bernd Hafner | 2019-10-15 |
| 8723138 | Electron beam source and method of manufacturing the same | Ulrich Mantz, Bernd Irmer, Christian Penzkofer | 2014-05-13 |
| 8536773 | Electron beam source and method of manufacturing the same | Wolfram Buehler | 2013-09-17 |
| 8431894 | Electron beam device | Erik Essers, Gerd Benner | 2013-04-30 |
| 8362443 | Objective lens | — | 2013-01-29 |
| 8178849 | Objective lens | — | 2012-05-15 |
| 8164071 | Electron beam source and method of manufacturing the same | Ulrich Mantz, Bernd Irmer, Christian Penzkofer | 2012-04-24 |
| 7910887 | Electron-beam device and detector system | Michael Steigerwald, Dirk Preikszas | 2011-03-22 |
| 7507962 | Electron-beam device and detector system | Michael Steigerwald, Dirk Preikszas | 2009-03-24 |
| 7462839 | Detector for variable pressure areas and an electron microscope comprising a corresponding detector | Peter Gnauck, David Bate, Eric Essers | 2008-12-09 |
| 7425701 | Electron-beam device and detector system | Michael Steigerwald, Dirk Preikszas | 2008-09-16 |
| 7060978 | Detector system for a particle beam apparatus, and particle beam apparatus with such a detector system | Johannes Bihr, Gerd Benner, Stephan Kujawa | 2006-06-13 |
| 6872956 | Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device | Peter Gnauck | 2005-03-29 |
| 6498345 | Particle beam device | Eugen Weimer | 2002-12-24 |