MS

Michael Steigerwald

CG Carl Zeiss Nts Gmbh: 8 patents #3 of 103Top 3%
KL Kla: 4 patents #87 of 758Top 15%
AL Alis: 1 patents #10 of 14Top 75%
CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
LG Leo Elektronenmikroskopie Gmbh: 1 patents #5 of 21Top 25%
📍 Milpitas, CA: #317 of 3,192 inventorsTop 10%
🗺 California: #37,514 of 386,348 inventorsTop 10%
Overall (All Time): #284,474 of 4,157,543Top 7%
16
Patents All Time

Issued Patents All Time

Showing 1–16 of 16 patents

Patent #TitleCo-InventorsDate
12283453 Creating multiple electron beams with a photocathode film Xinrong Jiang, Youfei Jiang, Ralph Nyffenegger 2025-04-22
12165831 Method and system of image-forming multi-electron beams Xinrong Jiang, Christopher Sears, Youfei Jiang, Sameet K. Shriyan, Jeong Ho Lee +1 more 2024-12-10
12068129 Tilt-column multi-beam electron microscopy system and method Xinrong Jiang, Youfei Jiang, Ralph Nyffenegger 2024-08-20
11749495 Bandpass charged particle energy filtering detector for charged particle tools Youfei Jiang 2023-09-05
8304750 Scanning charged particle beams Dirk Preikszas, Joerg Ackermann 2012-11-06
8283641 Positioning device for a particle beam apparatus Dietmar Dönitz, Dirk Preixszas 2012-10-09
8063364 Particle optical device with magnet assembly Dirk Preikszas, Daniel Tobias, Andreas Eisele, Momme Mommsen, Dietmar Doenitz +1 more 2011-11-22
7910887 Electron-beam device and detector system Dirk Preikszas, Volker Drexel 2011-03-22
7518122 Ion sources, systems and methods Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill +1 more 2009-04-14
7507962 Electron-beam device and detector system Dirk Preikszas, Volker Drexel 2009-03-24
7425701 Electron-beam device and detector system Dirk Preikszas, Volker Drexel 2008-09-16
7022987 Particle-optical arrangements and particle-optical systems Dirk Preikszas 2006-04-04
6949744 Electron microscopy system, electron microscopy method and focusing system for charged particles Erik Essers 2005-09-27
6903337 Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same Oliver Kienzle, Dirk Stenkamp, Rainer Knippelmeyer, Max Haider, Heiko Müller +1 more 2005-06-07
6855938 Objective lens for an electron microscopy system and electron microscopy system Dirk Preikszas, Peter Hoffrogge, Peter Gnauck 2005-02-15
6828565 Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source 2004-12-07