| 11527379 |
Objective lens arrangement usable in particle-optical systems |
Stefan Schubert |
2022-12-13 |
|
| 11302511 |
Field curvature correction for multi-beam inspection systems |
Alan D. Brodie, Christopher Sears, John Rouse, Grace Hsiu-Ling Chen |
2022-04-12 |
$70,726,000 |
| 11120969 |
Method and system for charged particle microscopy with improved image beam stabilization and interrogation |
Doug K. Masnaghetti, Gabor Toth, David Trease, Rohit Bothra, Grace Hsiu-Ling Chen |
2021-09-14 |
$65,482,000 |
| 10861671 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system |
Doug K. Masnaghetti, Richard R. Simmons, Scott A. Young, Mark A. McCord |
2020-12-08 |
$176,504,000 |
| 10643819 |
Method and system for charged particle microscopy with improved image beam stabilization and interrogation |
Doug K. Masnaghetti, Gabor Toth, David Trease, Rohit Bothra, Grace Hsiu-Ling Chen |
2020-05-05 |
|
| 10622184 |
Objective lens arrangement usable in particle-optical systems |
Stefan Schubert |
2020-04-14 |
|
| 10541112 |
Charged particle beam system and method of operating the same |
Stefan Schubert, Thomas Kemen |
2020-01-21 |
|
| 10504681 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more |
2019-12-10 |
|
| 10460905 |
Backscattered electrons (BSE) imaging using multi-beam tools |
Mark A. McCord, Richard R. Simmons, Doug K. Masnaghetti |
2019-10-29 |
|
| 10366862 |
Method and system for noise mitigation in a multi-beam scanning electron microscopy system |
Doug K. Masnaghetti, Richard R. Simmons, Mark A. McCord |
2019-07-30 |
|
| 10354831 |
Charged particle inspection method and charged particle system |
Thomas Kemen, Stefan Schubert |
2019-07-16 |
|
| 10325753 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system |
Doug K. Masnaghetti, Richard R. Simmons, Scott A. Young, Mark A. McCord |
2019-06-18 |
$121,062,000 |
| 10192716 |
Multi-beam dark field imaging |
Doug K. Masnaghetti, Mark A. McCord, Richard R. Simmons |
2019-01-29 |
|
| 10121635 |
Charged particle beam system and method of operating the same |
Stefan Schubert, Thomas Kemen |
2018-11-06 |
|
| 9673024 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more |
2017-06-06 |
$20,400,000 |
| 9530613 |
Focusing a charged particle system |
Steven R. Rogers, Thomas Kemen, Stefan Schubert, Nissim Elmaliah |
2016-12-27 |
$14,994,000 |
| 9336981 |
Charged particle detection system and multi-beamlet inspection system |
— |
2016-05-10 |
$10,962,000 |
| 9324537 |
Charged particle inspection method and charged particle system |
Thomas Kemen, Stefan Schubert |
2016-04-26 |
$17,040,000 |
| 9263233 |
Charged particle multi-beam inspection system and method of operating the same |
Dirk Zeidler, Thomas Kemen, Mario Muetzel, Stefan Schubert, Nissim Elmaliah +1 more |
2016-02-16 |
|
| 9224576 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more |
2015-12-29 |
|
| 9099282 |
Focusing a charged particle imaging system |
Steven R. Rogers, Thomas Kemen, Stefan Schubert, Nissim Elmaliah |
2015-08-04 |
$15,119,000 |
| 8907277 |
Reducing particle implantation |
Nicholas Economou, Mohan Ananth, Lewis A. Stern, Bill DiNatale, Lawrence Scipioni +1 more |
2014-12-09 |
|
| 8637834 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximillian Haider +2 more |
2014-01-28 |
$15,652,000 |
| 8384029 |
Cross-section systems and methods |
Lawrence Scipioni, Christoph Riedesel, John Morgan, Ulrich Mantz, Ulrich Wagemann |
2013-02-26 |
|
| 8334701 |
Repairing defects |
Christoph Riedesel, John Morgan, Lawrence Scipioni |
2012-12-18 |
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