Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527379 | Objective lens arrangement usable in particle-optical systems | Stefan Schubert | 2022-12-13 |
| 11302511 | Field curvature correction for multi-beam inspection systems | Alan D. Brodie, Christopher Sears, John Rouse, Grace Hsiu-Ling Chen | 2022-04-12 |
| 11120969 | Method and system for charged particle microscopy with improved image beam stabilization and interrogation | Doug K. Masnaghetti, Gabor Toth, David Trease, Rohit Bothra, Grace Hsiu-Ling Chen | 2021-09-14 |
| 10861671 | Method and system for focus adjustment of a multi-beam scanning electron microscopy system | Doug K. Masnaghetti, Richard R. Simmons, Scott A. Young, Mark A. McCord | 2020-12-08 |
| 10643819 | Method and system for charged particle microscopy with improved image beam stabilization and interrogation | Doug K. Masnaghetti, Gabor Toth, David Trease, Rohit Bothra, Grace Hsiu-Ling Chen | 2020-05-05 |
| 10622184 | Objective lens arrangement usable in particle-optical systems | Stefan Schubert | 2020-04-14 |
| 10541112 | Charged particle beam system and method of operating the same | Stefan Schubert, Thomas Kemen | 2020-01-21 |
| 10504681 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more | 2019-12-10 |
| 10460905 | Backscattered electrons (BSE) imaging using multi-beam tools | Mark A. McCord, Richard R. Simmons, Doug K. Masnaghetti | 2019-10-29 |
| 10366862 | Method and system for noise mitigation in a multi-beam scanning electron microscopy system | Doug K. Masnaghetti, Richard R. Simmons, Mark A. McCord | 2019-07-30 |
| 10354831 | Charged particle inspection method and charged particle system | Thomas Kemen, Stefan Schubert | 2019-07-16 |
| 10325753 | Method and system for focus adjustment of a multi-beam scanning electron microscopy system | Doug K. Masnaghetti, Richard R. Simmons, Scott A. Young, Mark A. McCord | 2019-06-18 |
| 10192716 | Multi-beam dark field imaging | Doug K. Masnaghetti, Mark A. McCord, Richard R. Simmons | 2019-01-29 |
| 10121635 | Charged particle beam system and method of operating the same | Stefan Schubert, Thomas Kemen | 2018-11-06 |
| 9673024 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more | 2017-06-06 |
| 9530613 | Focusing a charged particle system | Steven R. Rogers, Thomas Kemen, Stefan Schubert, Nissim Elmaliah | 2016-12-27 |
| 9336981 | Charged particle detection system and multi-beamlet inspection system | — | 2016-05-10 |
| 9324537 | Charged particle inspection method and charged particle system | Thomas Kemen, Stefan Schubert | 2016-04-26 |
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Dirk Zeidler, Thomas Kemen, Mario Muetzel, Stefan Schubert, Nissim Elmaliah +1 more | 2016-02-16 |
| 9224576 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more | 2015-12-29 |
| 9099282 | Focusing a charged particle imaging system | Steven R. Rogers, Thomas Kemen, Stefan Schubert, Nissim Elmaliah | 2015-08-04 |
| 8907277 | Reducing particle implantation | Nicholas Economou, Mohan Ananth, Lewis A. Stern, Bill DiNatale, Lawrence Scipioni +1 more | 2014-12-09 |
| 8637834 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximillian Haider +2 more | 2014-01-28 |
| 8384029 | Cross-section systems and methods | Lawrence Scipioni, Christoph Riedesel, John Morgan, Ulrich Mantz, Ulrich Wagemann | 2013-02-26 |
| 8334701 | Repairing defects | Christoph Riedesel, John Morgan, Lawrence Scipioni | 2012-12-18 |