Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495433 | Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen | Benjamin John Cook, Dieter Winkler, Markus Thomann, Roman Barday | 2022-11-08 |
| 11087948 | Multi-beam charged particle system | Dirk Zeidler, Christof Riedesel, Ralf Lenke, Joerg Jacobi | 2021-08-10 |
| 10784070 | Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device | Benjamin John Cook, Roman Barday | 2020-09-22 |
| 10741355 | Multi-beam charged particle system | Dirk Zeidler, Christof Riedesel, Ralf Lenke, Joerg Jacobi | 2020-08-11 |
| 10600613 | Particle beam system | Dirk Zeidler, Christof Riedesel, Ralf Lenke | 2020-03-24 |
| 10541112 | Charged particle beam system and method of operating the same | Stefan Schubert, Rainer Knippelmeyer | 2020-01-21 |
| 10504681 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Rainer Knippelmeyer, Oliver Kienzle, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more | 2019-12-10 |
| 10354831 | Charged particle inspection method and charged particle system | Rainer Knippelmeyer, Stefan Schubert | 2019-07-16 |
| 10147582 | Particle beam system | Dirk Zeidler, Christof Riedesel, Ralf Lenke | 2018-12-04 |
| 10121635 | Charged particle beam system and method of operating the same | Stefan Schubert, Rainer Knippelmeyer | 2018-11-06 |
| 9991089 | Particle beam system and method for operating a particle optical unit | Ingo Mueller, Nicole Rauwolf, Christof Riedesel, Joerg Jacobi, Arne Thoma +4 more | 2018-06-05 |
| 9799485 | Particle beam system and method for operating a particle optical unit | Ingo Mueller, Nicole Bengesser, Christof Riedesel, Joerg Jacobi, Arne Thoma +4 more | 2017-10-24 |
| 9673024 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Rainer Knippelmeyer, Oliver Kienzle, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more | 2017-06-06 |
| 9653254 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Dirk Zeidler, Anger Pascal, Antonio Casares, Christof Riedesel | 2017-05-16 |
| 9552957 | Particle beam system | Dirk Zeidler, Christof Riedesel, Ralf Lenke | 2017-01-24 |
| 9530613 | Focusing a charged particle system | Steven R. Rogers, Rainer Knippelmeyer, Stefan Schubert, Nissim Elmaliah | 2016-12-27 |
| 9384938 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Dirk Zeidler, Pascal Anger, Antonio Casares, Christof Riedesel | 2016-07-05 |
| 9349571 | Particle optical system | Pascal Anger, Dirk Zeidler, Gerd Benner | 2016-05-24 |
| 9324537 | Charged particle inspection method and charged particle system | Rainer Knippelmeyer, Stefan Schubert | 2016-04-26 |
| 9263233 | Charged particle multi-beam inspection system and method of operating the same | Dirk Zeidler, Rainer Knippelmeyer, Mario Muetzel, Stefan Schubert, Nissim Elmaliah +1 more | 2016-02-16 |
| 9224576 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Rainer Knippelmeyer, Oliver Kienzle, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more | 2015-12-29 |
| 9099282 | Focusing a charged particle imaging system | Steven R. Rogers, Rainer Knippelmeyer, Stefan Schubert, Nissim Elmaliah | 2015-08-04 |
| 8637834 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Rainer Knippelmeyer, Oliver Kienzle, Heiko Mueller, Stephan Uhlemann, Maximillian Haider +2 more | 2014-01-28 |
| 8598525 | Particle beam system | Dirk Zeidler | 2013-12-03 |
| 8097847 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Rainer Knippelmeyer, Oliver Kienzle, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +1 more | 2012-01-17 |