Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283457 | Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt | Nico Kaemmer, Michael Behnke, Ingo Mueller, Dirk Zeidler, Arne Thoma +2 more | 2025-04-22 |
| 9991089 | Particle beam system and method for operating a particle optical unit | Ingo Mueller, Christof Riedesel, Thomas Kemen, Joerg Jacobi, Arne Thoma +4 more | 2018-06-05 |